Jaehyuk Park

Fabrication and scanning-angle temperature dependence of metal-based, optical resonant scanners with PZT actuation

Metal-based, optical scanning devices with a large mirror size of 1 mm2 and a wide scanning angle of over 90deg were fabricated. A high optical scanning angle (90deg) was achieved at a resonance frequency of 7.33 kHz and a driving voltage of 80 V (peak-to-peak) in ambient air without vacuum packaging. We compared the performance of metal-based, optical scanners driven by PZT bulk ceramic and aerosol-deposited PZT thick films over the temperature range from -20degC to 80degC in an environmental chamber.

Practical High-Speed Metal-Based Optical Microscanning Devices with Low Production Cost

Practical high-speed metal-based optical microscanning devices with low production cost and simple fabrication process were successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35 ° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package.

Transparent electrooptical nanocomposite thick films by serosol deposition method for application to ultrahigh-speed optical switches

We prepared high transparent electrooptical gold/lead zirconate titanate (PZT) nanocomposite thick films by aerosol deposition method (ADM) for the first time and report their enhanced surface plasmon resonance (SPR) properties. ADM has been attracting much attention for its ability to deposit complex composite films at a high deposition rate and a low process temperature. Composite metal-dielectric powders are prepared from submicron particles of PZT and nano particles of gold (10-40 nm) with concentrations below 1 wt%. Nanocomposite gold/PZT 3-mum-thick film acquired enhanced SPR at approximately 640 nm as a result of annealing. The SPR position in nanocomposite films deposited by ADM can be precisely controlled by adjusting the dielectric constant of the host matrix by annealing.. Moreover, nano gold particles were spatially very well distributed in the PZT matrix and showed no growth in spite of annealing at 600degC.

Optical scanning devices based on PZT thick films formed by aerosol deposition method

High-speed metal-based optical microscanning devices with low production cost and simple fabrication process wre successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package. The scanner is applicable to SVGA high-resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.

Metal-based Optical MEMS Scanning Devices Using Lead-Free Piezoelectric Sheets Prepared by Aerosol Deposition

We demonstrate metal-based lamb-wave resonant optical MEMS scanning devices actuated by aerosol deposition (AD) piezoelectric film and report their temperature properties and durability. Metal-based structure was introduced to reduce the production cost and to improve the optical scanning performance, simultaneously. The optical scanning devices with large mirror size as well as high scanning angle were fabricated. A high optical scanning angle (more than 60 °) and a high resonant frequency (more than 25 kHz) were achieved in ambient air without vacuum packaging. The resonant frequency and the scanning angle do not have any changes during life test of approximately 50,000 hours. In this report, BaTiO3 (BTO) thick film as a lead free piezoelectric material was prepared by AD process for a piezoelectric exaltation source of scanning devices. Piezoelectric d31 of BTO-AD film was approximately −138 pm/V. The performance of optical scanner driven by AD-BTO thick film was comparable with that of BTO bulk materi...

Fabrication of ferroelectric optical nanocomposite thick films by aerosol deposition method

We demonstrate a fabrication of ferroelectric optical nanocomposite thick films by aerosol deposition method (ADM) and report their highly enhanced optical and electrical characteristics. Nanocomposite gold / PZT 3-¿m-thick films acquired the enhanced surface plasmon resonance at a wavelength of 640 nm as well as the enhanced electrical properties. The strength and the position of surface plasmon resonance at the nanocomposite films deposited by ADM could be controlled by adjusting the concentration and the shape of nanogold in the host matrix.