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James Allan Bondur

IBM

Publication

Featured researches published by James Allan Bondur.

Archive | 1977

Method for forming isolated regions of silicon utilizing reactive ion etching

James Allan Bondur; Hans Bernhard Pogge

Archive | 1977

Reactive ion etching method for producing deep dielectric isolation in silicon

James Allan Bondur; Hans Bernhard Pogge

Archive | 1987

Rie process for etching silicon isolation trenches and polycides with vertical surfaces

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1988

Gas mixture and method for anisotropic selective etch of nitride

James Allan Bondur; François Martinet

Archive | 1978

Method for producing laterally isolated silicium areas

James Allan Bondur; Hans Bernhard Pogge

Archive | 1989

Anisotropic elective etch of nitride

James Allan Bondur; François Martinet

Archive | 1987

Rie-verfahren um isolationsrillen mit senkrechten flanken in silizium und polycid zu aetzen. Rie-moved by isolation grooves with vertical flanks in silicon and polycide etch.

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1987

Rie-verfahren um isolationsrillen mit senkrechten flanken in silizium und polycid zu aetzen.

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1987

Rie-moved by isolation grooves with vertical flanks in silicon and to etch polycide.

James Allan Bondur; Nicholas James Giammarco; Thomas Adrian Hansen; George A. Kaplita; John S. Lechaton

Archive | 1978

Verfahren zum Herstellen von lateral isolierten Siliciumbereichen

James Allan Bondur; Hans Bernhard Pogge

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