James Allan Bondur

Method for forming isolated regions of silicon utilizing reactive ion etching

Reactive ion etching method for producing deep dielectric isolation in silicon

Rie process for etching silicon isolation trenches and polycides with vertical surfaces

Gas mixture and method for anisotropic selective etch of nitride

Method for producing laterally isolated silicium areas

Anisotropic elective etch of nitride

Rie-verfahren um isolationsrillen mit senkrechten flanken in silizium und polycid zu aetzen. Rie-moved by isolation grooves with vertical flanks in silicon and polycide etch.

Rie-verfahren um isolationsrillen mit senkrechten flanken in silizium und polycid zu aetzen.

Rie-moved by isolation grooves with vertical flanks in silicon and to etch polycide.

Verfahren zum Herstellen von lateral isolierten Siliciumbereichen