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James Broc Stirton

Advanced Micro Devices

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Publication

Featured researches published by James Broc Stirton.

Archive | 2001

Method and apparatus for controlling photolithography overlay registration

James Broc Stirton

Archive | 2002

Method and apparatus for selecting wafer alignment marks based on film thickness variation

James Broc Stirton

Archive | 2003

Methods of using adaptive sampling techniques based upon categorization of process variations, and system for performing same

James Broc Stirton

Archive | 2001

Method and apparatus for identifying misregistration in a complimentary phase shift mask process

Marilyn I. Wright; Kevin R. Lensing; James Broc Stirton

Archive | 2003

Method and apparatus for determining feature characteristics using scatterometry

James Broc Stirton

Archive | 2001

Method and apparatus for periodic correction of metrology data

James Broc Stirton; Kevin R. Lensing

Archive | 2002

Method of controlling stepper process parameters based upon scatterometric measurements of DICD features

James Broc Stirton

Archive | 2001

Method and apparatus for controlling a polishing process based on scatterometry derived film thickness variation

James Broc Stirton

Archive | 2003

Method of identifying film stacks based upon optical properties

James Broc Stirton

Archive | 2003

Method and apparatus for filtering metrology data based on collection purpose

James Broc Stirton

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Collaboration

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Kevin R. Lensing

Advanced Micro Devices

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Homi E. Nariman

Advanced Micro Devices

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Steven P. Reeves

Advanced Micro Devices

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Marilyn I. Wright

Advanced Micro Devices

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Andre Holfeld

Advanced Micro Devices

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Richard Good

Advanced Micro Devices

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Richard J. Markle

Advanced Micro Devices

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Christopher A. Bode

Advanced Micro Devices

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Hans-Jürgen Malig

Advanced Micro Devices

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Richard D. Edwards

Advanced Micro Devices

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