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James H. Rogers

Intevac

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Publication

Featured researches published by James H. Rogers.

Archive | 2000

Plasma processing system and method

Terry Bluck; James H. Rogers

Archive | 1998

Processing systems with dual ion sources

Terry Bluck; James H. Rogers; Sean P. Mcginnis

Archive | 2001

Methods and apparatus for processing insulating substrates

Terry Bluck; James H. Rogers; Jun Xie; Eric C. Lawson

Archive | 2005

Capacitance sensing for substrate cooling

James H. Rogers; Brian Hoffman

Archive | 2005

Kapazitätserfassung für substratkühlung

James H. Rogers; Brian Hoffman

Archive | 2001

Plasmaverarbeitungssystem und Verfahren

Terry Bluck; James H. Rogers

Archive | 2000

Plasmaverarbeitungssystem und Verfahren Plasma processing system and method

Terry Bluck; James H. Rogers; Jun Xie

Archive | 2000

Substratverarbeitungssystem, dessen Verwendung sowie Verfahren zur Bearbeitung eines Substrates A substrate processing system, its use and method for processing a substrate

Terry Bluck; James H. Rogers; Jun Xie

Archive | 2000

A substrate processing system, its use and method for processing a substrate

Terry Bluck; James H. Rogers; Jun Xie

Archive | 1999

Verarbeitungssystem mit doppelten Ionenquellen Processing system with dual ion sources

Terry Bluck; James H. Rogers; Sean P. Mcginnis

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Terry Bluck

Intevac

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Jun Xie

Intevac

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Sean P. Mcginnis

Intevac

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Brian Hoffman

Intevac

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Eric C. Lawson

Intevac

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