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Terry Bluck

Intevac

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Publication

Featured researches published by Terry Bluck.

Archive | 2012

Substrate processing system and method

Terry Pederson; Henry Hieslmair; Moon Chun; Vinay Prabhakar; Babak Adibi; Terry Bluck

Archive | 2003

Disk coating system

Kevin P. Fairbairn; Terry Bluck; Craig Marion; Robert E. Weiss

Archive | 2000

Plasma processing system and method

Terry Bluck; James H. Rogers

Archive | 2008

Apparatus and methods for transporting and processing substrates

Terry Bluck; Kevin P. Fairbairn; Michael S. Barnes; Christopher T. Lane

Archive | 2008

Power source arrangement for multiple-target sputtering system

Terry Bluck; Patrick R. Ward; Michael S. Barnes

Archive | 1998

Processing systems with dual ion sources

Terry Bluck; James H. Rogers; Sean P. Mcginnis

Archive | 2009

Processing thin wafers

Terry Bluck; Stuart Scollay; Edric Tong

Archive | 2009

Method for optimized removal of wafer from electrostatic chuck

Terry Bluck; Hizam Sahibudeen; Dennis Grimard

Archive | 2009

System and method for processing substrates with detachable mask

Michael S. Barnes; Terry Bluck

Archive | 2012

High throughput load lock for solar wafers

Vinay Shah; William Runstadler; Kevin P. Fairbairn; Terry Bluck; Richard Henry Cooke

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Collaboration

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Kevin P. Fairbairn

Intevac

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Vinay Shah

Intevac

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Michael S. Barnes

Intevac

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James H. Rogers

Intevac

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Babak Adibi

Intevac

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Jun Xie

Intevac

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Karthik Janakiraman

Intevac

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Michael Barnes

Applied Materials

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Sean P. Mcginnis

Intevac

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Terry Pederson

Intevac

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