James N. Humenik

An advanced multichip module (MCM) for high-performance UNIX servers

In 2001, IBM delivered to the marketplace a high-performance UNIX?®-class eServer based on a four-chip multichip module (MCM) code named Regatta. This MCM supports four POWER4 chips, each with 170 million transistors, which utilize the IBM advanced copper back-end interconnect technology. Each chip is attached to the MCM through 7018 flip-chip solder connections. The MCM, fabricated using the IBM high-performance glass-ceramic technology, features 1.7 million internal copper vias and high-density top-surface contact pad arrays with 100-?µm pads on 200-?µm centers. Interconnections between chips on the MCM and interconnections to the board for power distribution and MCM-to-MCM communication are provided by 190 meters of co-sintered copper wiring. Additionally, the 5100 off-module connections on the bottom side of the MCM are fabricated at a 1-mm pitch and connected to the board through the use of a novel land grid array technology, thus enabling a compact 85-mm ?? 85-mm module footprint that enables 8- to 32-way systems with processors operating at 1.1 GHz or 1.3 GHz. The MCM also incorporates advanced thermal solutions that enable 156 W of cooling per chip. This paper presents a detailed overview of the fabrication, assembly, testing, and reliability qualification of this advanced MCM technology.

3D Ceramic Microfluidic Device Manufacturing

Today, semiconductor processing serves as the backbone for the bulk of micromachined devices. Precision lithography and etching technology used in the semiconductor industry are also leveraged by alternate techniques like electroforming and molding. The nature of such processing is complex, limited and expensive for any manufacturing foundry. This paper details the technology elements developed to manufacture cost effective and versatile microfluidic devices for applications ranging from medical diagnostics to characterization of bioassays. Two applications using multilayer ceramic technology to manufacture complex 3D microfluidic devices are discussed.

Multi-chip package thermal management of IBM z-server systems

The recently announced IBM z9 server system presents unique cooling requirements from a packaging perspective. Cooling has to be achieved for sixteen chips mounted on a common glass ceramic chip carrier. Eight of the sixteen chips dissipate significant power. A recently described small gap technology (SGT) is used to attain customized chip to cap gaps. An advanced thermal compound (ATC) is used as the interface between the chips and the cap. The package thermal and mechanical design is first described. Design optimization is achieved by detailed finite element thermo-mechanical modeling. The complex encapsulation process to attain the correct chip to hat ATC gaps is outlined. Verification of the ATC gaps is an integral part of the assembly process. The reliability qualification is then discussed. Issues found during the qualification were the structural fragility of the glass ceramic chip carrier flange and ATC thermal degradation. The structural robustness of the chip carrier was improved by modifying its design. ATC degradation is quantitatively related to the shear strain