Philip L. Flaitz

Imaging of Arsenic Cottrell Atmospheres Around Silicon Defects by Three-Dimensional Atom Probe Tomography

Discrete control of individual dopant or impurity atoms is critical to the electrical characteristics and fabrication of silicon nanodevices. The unavoidable introduction of defects into silicon during the implantation process may prevent the uniform distribution of dopant atoms. Cottrell atmospheres are one such nonuniformity and occur when interstitial atoms interact with dislocations, pinning the dislocation and trapping the interstitial. Atom probe tomography has been used to quantify the location and elemental identity of the atoms proximate to defects in silicon. We found that Cottrell atmospheres of arsenic atoms form around defects after ion implantation and annealing. Furthermore, these atmospheres persist in surrounding dislocation loops even after considerable thermal treatment. If not properly accommodated, these atmospheres create dopant fluctuations that ultimately limit the scalability of silicon devices.

Impact of Cu microstructure on electromigration reliability

The effect of Cu microstructure on electromigration (EM) has been investigated. A variation in the Cu grain size distributions between wafers was achieved by adjusting the wafer annealing process step after Cu electroplating and before Cu chemical mechanical polishing. Void growth morphology was observed by in-situ and ex-situ scanning electron microscope (SEM) techniques. The Cu lifetime and mass flow in samples with bamboo, near bamboo, bamboo-polycrystalline mixture, and polycrystalline grain structures were measured. The introduction of polycrystalline Cu line grain structure in fine lines for the 65 nm node technology and beyond markedly reduced the Cu EM reliability. The smaller Cu grain size distribution resulted in a shorter EM lifetime and a faster mass flow. The EM activation energies for Cu along Cu/amorphous a-SiCxNyHz interface and grain boundary were found to be 0.95 and 0.79 eV, respectively.

Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage

The resistance to plasma-induced damage of various nanoporous, ultra low-κ porous SiCOH films used as interconnect dielectric materials in integrated circuits was studied. These films are susceptible to damage by plasma processes used during nanofabrication. The dielectric constants and chemical compositions of four dielectric films were correlated with measured amounts of plasma damage. Films deposited with higher carbon content in the form of Si–CH3 and Si(CH3)2 bonding exhibited less plasma damage than similar films with lower carbon content.

Effect of Zn doping on SnAg solder microstructure and electromigration stability

A comprehensive study on the effect of Zn-doped SnAg solders on microstructure and electromigration (EM) is reported. Minor Zn doping, about 0.6 wt %, in a SnAg solder alloy is found to be effective in stabilizing solder microstructure and improving EM reliability. Early EM failure modes in Zn-doped solders are significantly suppressed, resulting in a longer EM lifetime with tight distributions. Analyses using optical microscopy, scanning electron microcopy, transmission electron microscopy, electron microprobe analysis, and electron backscattering diffraction were conducted. Zn addition in SnAg leads to significant changes in solder microstructure, grain structure, and thermal and EM stabilities. The strong reaction of Zn with Cu atoms effectively slowed down the Cu diffusion in β-Sn grains, thus improved the EM stability of Sn-rich solder joints.

On the dynamic resistance and reliability of phase change memory

A novel characterization metric for phase change memory based on the measured cell resistance during RESET programming is introduced. We show that this dasiadynamic resistancepsila (Rd) is inversely related to the programming current (I), as Rd = [A/I] + B. While the slope parameter A depends only on the intrinsic properties of the phase change material, the intercept B also depends on the effective physical dimensions of the memory element. We demonstrate that these two parameters provide characterization and insight into the degradation mechanisms of memory cells during operation.

CVD Co and its application to Cu damascene interconnections

Fundamental material interactions as pertinent to nano-scale copper interconnects were studied for CVD Co with a variety of micro-analytical techniques. Native Co oxide grew rapidly within a few hours (XPS). Incorporation of oxygen and carbon in the CVD Co films (by AES and SIMS) depended on underlying materials, such as Ta, TaN, or Ru. Copper film texture (by XRD) and agglomeration resistance (by AFM) showed correlations with amounts of in-film oxygen/carbon. Cobalt diffused through copper at normal processing temperatures (by SIMS). CVD Co demonstrated diffusion barrier performance to Cu (by Triangular Voltage Sweep, TVS), but not to O2. CVD Co was applied to 32 nm/22 nm damascene Cu interconnect fabrication in a scheme defined by the material studies. Lower post-CMP defect density and longer electromigration lifetimes were obtained.

Characterization of Selectively Deposited Cobalt Capping Layers: Selectivity and Electromigration Resistance

Co films were selectively deposited as Cu capping layers by chemical-vapor-deposition technique. X-ray fluorescence spectroscopy determined the Co deposition selectivity as a function of the deposition temperature and substrate materials. The Co/Cu interfacial property was characterized and revealed no detectable oxygen at the interface. The selectivity of the Co deposition process and the property of the resulted Co/Cu interface were further confirmed with time-dependent-dielectric-breakdown and electromigration tests.

Electromigration Reliability of Advanced Interconnects

Electromigration behavior in Cu damascene wires was studied for various metal line widths, thicknesses and grain sizes where the grain size was modulated by Cu linewidth and thickness, and by adjusting the wafer annealing process step after Cu electroplating and before Cu chemical mechanical polishing. Significantly different results were found between 0.2 μm and 65 nm CMOS node technologies. A larger variation of Cu grain size between the samples was achieved on 65 nm node which was due to the finer line width and thinner metal thickness. The Cu lifetime and mass flow in samples with bamboo, near bamboo, bamboo‐polycrystalline mixture, and polycrystalline grain structures were measured. These factors allow one to accurately resolve the relative contribution between grain boundary and interface diffusions in the Cu nanowires. The electromigration mass flow estimated from the lifetime on the test line on a W via and physically stable liner was found to be linearly proportional to current density. The effec...

Electromigration extendibility of Cu(Mn) alloy-seed interconnects, and understanding the fundamentals

Cu(Mn) alloy seed BEOL studies revealed fundamental insights into Mn segregation and EM enhancement. We found a metallic-state Mn-rich Cu layer under the MnOx layer at the Cu/SiCNH cap interface, and correlated this metallic layer with additional EM enhancement. A carbonyl-based CVD-Co liner film consumed Mn, reducing its segregation and EM benefit, suggesting O-free Co liner films are strategic for Cu-alloy seed extendibility.

CVD-Co/Cu(Mn) integration and reliability for 10 nm node

In studying integrated dual damascene hardware at 10 nm node dimensions, we identified the mechanism for Co liner enhancement of Cu gap-fill to be a wetting improvement of the PVD Cu seed, rather than a local nucleation enhancement for Cu plating. We then show that Co “divot” (top-comer slit void defect) formation can be suppressed by a new wet chemistry, in turn eliminating divot-induced EM degradation. Further, we confirm a relative decrease in Cu-alloy seed proportional resistivity impact compared to scattering at scaled dimensions, and finally we address the incompatibility between the commonly-used carbonyl-based CVD-Co process with Cu-alloy seed EM performance This problem is due to oxidation of Ta(N) barriers at the TaN/CVD-Co interface by carbonyl-based CVD processes, which then consumes alloy atoms before they can segregate at the Cu/cap interface. We show that O-free CVD-Co may solve this problem. The above solutions may then enable CVD-Co/Cu-alloy seed integration in advanced nodes.