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Dive into the research topics where Janet M. Cassard is active.

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Featured researches published by Janet M. Cassard.


international conference on microelectronic test structures | 2012

The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)

Janet M. Cassard; Jon C. Geist; Michael Gaitan; David G. Seiler

The Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with National Institute of Standards and Technology (NIST) measurements, thereby validating their use of the documentary standard test methods. Examples of NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.


NIST Interagency/Internal Report (NISTIR) - | 1994

Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service

Janet M. Cassard; Michael Gaitan; Mona E. Zaghloul; Donald B. Novotny; V. C. Tyree; J. I. Pi; C. Pina; W. Hansford


NIST Interagency/Internal Report (NISTIR) - | 1992

Methodology for the computer-aided design of silicon micromachined devices in a standard CMOS process

Janet M. Cassard; M. Parameswaran; Mona E. Zaghloul; Michael Gaitan


ECS Transactions | 2014

Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable

Janet M. Cassard; Jon C. Geist; John Kramar


225th ECS Meeting (May 11-15, 2014) | 2014

(Invited) Reference Materials 8096 and 8097 - The Microelectromechanical Systems 5-in-1 Reference Materials: Homogeneous and Stable

Janet M. Cassard; Jon C. Geist; John Kramar


Special Publication (NIST SP) - 260-177 | 2013

User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition

Janet M. Cassard; Jon C. Geist; Theodore V. Vorburger; David T. Read; Michael Gaitan; David G. Seiler


Archive | 2013

Standard Reference Materials(R) User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition

Janet M. Cassard; Jon C. Geist; Theodore V. Vorburger; David T. Read; Michael Gaitan; David G. Seiler


2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics | 2013

The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)

Janet M. Cassard; Jon C. Geist; Craig D. McGray; Richard A. Allen; Muhammad Y. Afridi; Brian J. Nablo; Michael Gaitan; David G. Seiler


Special Publication (NIST SP) - 260-179 | 2011

User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition

Janet M. Cassard; Jon C. Geist; Theodore V. Vorburger; David T. Read; David G. Seiler


MST News | 2008

The NIST MNT 5-in-1 Standard Reference Material for Measuring 5 Key Metrics

Janet M. Cassard; Jon C. Geist; Michael Gaitan

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Jon C. Geist

National Institute of Standards and Technology

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Michael Gaitan

National Institute of Standards and Technology

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David G. Seiler

National Institute of Standards and Technology

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Mona E. Zaghloul

George Washington University

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David T. Read

National Institute of Standards and Technology

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Brian J. Nablo

National Institute of Standards and Technology

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Muhammad Y. Afridi

George Washington University

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Richard A. Allen

National Institute of Standards and Technology

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