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Jarmo Maula

Planar Systems

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Publication

Featured researches published by Jarmo Maula.

Archive | 2003

Precursor material delivery system for atomic layer deposition

Bradley J. Aitchison; Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Martti Sonninen

Archive | 2005

Multilayer material and method of preparing same

Jarmo Maula; Kari Härkönen; Anguel Nikolov

Archive | 2003

Conformal coatings for micro-optical elements

Jarmo Maula; Runar Törnqvist

Archive | 2008

Method in depositing metal oxide materials

Jarmo Maula; Kari Härkönen

Archive | 2003

High-speed diaphragm valve for atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

Archive | 2003

Diaphragm valve for high-temperature precursor supply in atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

Archive | 2003

Diaphragm valve with reliability enhancements for atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

Archive | 2003

Conformal coatings for micro-optical elements, and method for making the same

Jarmo Maula; Runar Törnqvist

Archive | 2006

Precursor material delivery system with thermal enhancements for atomic layer deposition

Bradley J. Aitchison; Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Martti Sonninen; Tommy Turkulainen

Archive | 2004

Diaphragm valve for atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

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Collaboration

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Kari Härkönen

Planar Systems

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Hannu Leskinen

Planar Systems

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Bradley J. Aitchison

Planar Systems

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Pekka Kuosmanen

Planar Systems

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Teemu Lang

Planar Systems

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Runar Törnqvist

Planar Systems

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Martti Sonninen

Planar Systems

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Tommy Turkulainen

Planar Systems

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Matti Putkonen

Helsinki University of Technology

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Mikko Söderlund

Helsinki University of Technology

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