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Teemu Lang

Planar Systems

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Publication

Featured researches published by Teemu Lang.

Archive | 2003

Precursor material delivery system for atomic layer deposition

Bradley J. Aitchison; Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Martti Sonninen

Archive | 2003

Deposition of carbon-and transition metal-containing thin films

Kari Härkönen; Mark Doczy; Teemu Lang; Nathan Baxter

Archive | 2003

High-speed diaphragm valve for atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

Archive | 2003

Diaphragm valve for high-temperature precursor supply in atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

Archive | 2003

Diaphragm valve with reliability enhancements for atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

Archive | 2006

Precursor material delivery system with thermal enhancements for atomic layer deposition

Bradley J. Aitchison; Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Martti Sonninen; Tommy Turkulainen

Archive | 2004

Diaphragm valve for atomic layer deposition

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

Archive | 2006

PRECURSOR MATERIAL DELIVERY SYSTEM WITH STAGING VOLUME FOR ATOMIC LAYER DEPOSITION

Bradley J. Aitchison; Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Martti Sonninen; Tommy Turkulainen

Archive | 2003

Precursor delivery system for atomic layer deposition

Bradley J. Aitchison; Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Haerkoenen; Martti Sonninen; Tommy Turkulainen

Archive | 2006

Membranventil zur Abscheidung von Atomschichten

Jarmo Maula; Hannu Leskinen; Teemu Lang; Pekka Kuosmanen; Kari Härkönen; Bradley J. Aitchison

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Collaboration

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Kari Härkönen

Planar Systems

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Bradley J. Aitchison

Planar Systems

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Hannu Leskinen

Planar Systems

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Jarmo Maula

Planar Systems

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Pekka Kuosmanen

Planar Systems

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Martti Sonninen

Planar Systems

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Nathan Baxter

Planar Systems

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Mark L. Doczy

Intel

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Robert S. Chau

Intel

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Tommy Turkulainen

Planar Systems

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