Jason M. Mumolo

A high-performance long wavelength superlattice complementary barrier infrared detector

We describe a long wavelength infrared detector where an InAs/GaSb superlattice absorber is surrounded by a pair of electron-blocking and hole-blocking unipolar barriers. A 9.9 μm cutoff device without antireflection coating based on this complementary barrier infrared detector design exhibits a responsivity of 1.5 A/W and a dark current density of 0.99×10−5 A/cm2 at 77 K under 0.2 V bias. The detector reaches 300 K background limited infrared photodetection (BLIP) operation at 87 K, with a black-body BLIP D∗ value of 1.1×1011 cm Hz1/2/W for f/2 optics under 0.2 V bias.

640/spl times/486 long-wavelength two-color GaAs/AlGaAs quantum well infrared photodetector (QWIP) focal plane array camera

We have designed and fabricated an optimized long-wavelength/very-long wavelength two-color quantum well infrared photodetector (QWIP) device structure. The device structure was grown on a 3-in semi-insulating GaAs substrate by molecular beam epitaxy (MBE). The wafer was processed into several 640/spl times/486 format monolithically integrated 8-9 and 14-15 /spl mu/m two-color (or dual wavelength) QWIP focal plane arrays (FPAs). These FPAs were then hybridized to 640/spl times/486 silicon CMOS readout multiplexers. A thinned (i.e., substrate removed) FPA hybrid was integrated into a liquid helium cooled dewar for electrical and optical characterization and to demonstrate simultaneous two-color imagery. The 8-9 /spl mu/m detectors in the FPA have shown background limited performance (BLIP) at 70 K operating temperature for 300 K background with f/2 cold stop. The 14-15 /spl mu/m detectors of the FPA reaches BLIP at 40 K operating temperature under the same background conditions. In this paper we discuss the performance of this long-wavelength dualband QWIP FPA in terms of quantum efficiency, detectivity, noise equivalent temperature difference (NE/spl Delta/T), uniformity, and operability.

640

Epitaxially grown self-assembled InAs-InGaAs-GaAs quantum dots (QDs) are exploited for the development of large-format long-wavelength infrared focal plane arrays (FPAs). The dot-in-a-well (DWELL) structures were experimentally shown to absorb both 45deg and normal incident light, therefore, a reflection grating structure was used to enhance the quantum efficiency. The devices exhibit peak responsivity out to 8.1 mum, with peak detectivity reaching ~1times1010 Jones at 77 K. The devices were fabricated into the first long-wavelength 640times512 pixel QD infrared photodetector imaging FPA, which has produced excellent infrared imagery with noise equivalent temperature difference of 40 mK at 60-K operating temperature

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Mid-wavelength infrared (MWIR) and long-wavelength infrared (LWIR) 1024 × 1024 pixel quantum well infrared photodetector (QWIP) focal planes have been demonstrated with excellent imaging performance. The MWIR QWIP detector array has demonstrated a noise equivalent differential temperature (NEΔT) of 17 mK at a 95 K operating temperature with f/2.5 optics at 300 K background and the LWIR detector array has demonstrated a NEΔT of 13 mK at a 70 K operating temperature with the same optical and background conditions as the MWIR detector array after the subtraction of system noise. Both MWIR and LWIR focal planes have shown background limited performance (BLIP) at 90 K and 70 K operating temperatures respectively, with similar optical and background conditions. In this paper, we will discuss the performance in terms of quantum efficiency, NEΔT, uniformity, operability and modulation transfer functions.

512 Pixels Long-Wavelength Infrared (LWIR) Quantum-Dot Infrared Photodetector (QDIP) Imaging Focal Plane Array

We describe the concept of the submonolayer quantum dot infrared photodetector (SML QDIP) and report experimental device results on long-wavelength infrared detection. An SML QDIP structure was fabricated into megapixel focal plane arrays, which produced clear infrared images up to 80 K. Detectors in the focal plane showed a responsivity peak at 7.8 μm and noise equivalent temperature difference of 33 mK at 70 K.We describe the concept of the submonolayer quantum dot infrared photodetector (SML QDIP) and report experimental device results on long-wavelength infrared detection. An SML QDIP structure was fabricated into megapixel focal plane arrays, which produced clear infrared images up to 80 K. Detectors in the focal plane showed a responsivity peak at 7.8 μm and noise equivalent temperature difference of 33 mK at 70 K.

1024 × 1024 pixel mid-wavelength and long-wavelength infrared QWIP focal plane arrays for imaging applications

A very long wavelength broadband infrared detector, sensitive over a 10–16 μm spectral range, based on GaAs/AlxGa1−xAs quantum wells grown by molecular beam epitaxy, has been demonstrated. Wavelength broadening of Δλ/λp∼42% is observed to be about a 400% increase compared to a typical bound-to-quasibound quantum well infrared photodetector (QWIP). In this device structure, which is different from typical QWIP device structures, two different gain mechanisms associated with photocurrent electrons and dark current electrons were observed and explained. Even with broader response, D*∼1×1010 cmHz/W at T=55 K is comparable to regular QWIPs with similar cutoff wavelengths.

Submonolayer quantum dot infrared photodetector

We study midinfrared type-II InAs∕GaSb superlattice p-i-n photodiodes for high temperature operation. Representative samples exhibit a 3.9μm cutoff wavelength at 250K and detectivity of 4.9×1013, 1.0×1010, and 2.4×109cmHz1∕2∕W at 78, 240, and 300K, respectively. Longer-wavelength devices exhibit a 5.2μm cutoff wavelength at 240K, and detectivity of 1.3×1013 and 1.5×109cmHz1∕2∕W at 78 and 240K, respectively. The electron beam induced current technique is used to investigate the spatially varying carrier collection efficiency contribution to the quantum efficiency at different biases and temperatures. The residual doping in the i region is determined to be 6.0×1013cm−3 (n type) at 78K. The prospect of operating focal plane arrays based on the sample studied around 240K is quite promising.

10–16 μm Broadband quantum well infrared photodetector

A 9 /spl mu/m cutoff 256/spl times/256 palm-size quantum well infrared photodetector (QWIP) camera weighing only 2.5 lbs, and using 5.5 W of power has been demonstrated. Excellent imagery, with a noise equivalent differential temperature (NE/spl Delta/T) of 23 mK has been achieved. It is well known that QWIP has very low 1/f noise, high operability, and uniformity. As a result, this camera uses a prerecorded nonuniformity correction table (i.e., gains and offsets) stored in its read-only-memory during operation, which enabled the miniaturization of this camera. In this paper, we discuss the development of this very sensitive long-wavelength infrared (LWIR) camera based on a GaAs/AlGaAs QWIP focal plane array (FPA) and its performance in terms of quantum efficiency, NE/spl Delta/T, MRDT, uniformity, and operability.

Midinfrared type-II InAs/GaSb superlattice photodiodes toward room temperature operation

Quantum well infrared photodetectors (QWIPs) are well known for their stability, high pixel-pixel uniformity and high pixel operability which are quintessential parameters for large area imaging arrays. In this paper we report the first demonstration of the megapixel-simultaneously-readable and pixel-co-registered dual-band QWIP focal plane array (FPA). The dual-band QWIP device was developed by stacking two multi-quantum-well stacks tuned to absorb two different infrared wavelengths. The full width at half maximum (FWHM) of the midwave infrared (MWIR) band extends from 4.4-5.1 ¿m and FWHM of the long-wave infrared (LWIR) band extends from 7.8-8.8 ¿m. Dual-band QWIP detector arrays were hybridized with direct injection 30 ¿m pixel pitch megapixel dual-band simultaneously readable CMOS read out integrated circuits using the indium bump hybridization technique. The initial dual-band megapixel QWIP FPAs were cooled to 68 K operating temperature. The preliminary data taken from the first megapixel QWIP FPA has shown system NE¿T of 27 and 40 mK for MWIR and LWIR bands, respectively.

Long-wavelength 256/spl times/256 GaAs/AlGaAs quantum well infrared photodetector (QWIP) palm-size camera

We have exploited the artificial atomlike properties of epitaxially grown self-assembled quantum dots for the development of high operating temperature long wavelength infrared (LWIR) focal plane arrays. Quantum dots are nanometer-scale islands that form spontaneously on a semiconductor substrate due to lattice mismatch. QDIPs are expected to outperform quantum well infrared detectors (QWIPs) and are expected to offer significant advantages over II-VI material based focal plane arrays. QDIPs are fabricated using robust wide bandgap III-V materials which are well suited to the production of highly uniform LWIR arrays. We have used molecular beam epitaxy (MBE) technology to grow multi-layer LWIR quantum dot structures based on the InAs/InGaAs/GaAs material system. JPL is building on its significant QWIP experience and is basically building a Dot-in-the-Well (DWELL) device design by embedding InAs/InGaAs quantum dots in a QWIP structure. This hybrid quantum dot/quantum well device offers additional control in wavelength tuning via control of dot-size and/or quantum well sizes. In addition the quantum wells can trap electrons and aide in ground state refilling. Recent measurements have shown a 10 times higher photoconductive gain than the typical QWIP device, which indirectly confirms the lower relaxation rate of excited electrons (photon bottleneck) in QDIPs. Subsequent material and device improvements have demonstrated an absorption quantum efficiency (QE) of ~ 3%. Dot-in-the-well (DWELL) QDIPs were also experimentally shown to absorb both 45° and normally incident light. Thus we have employed a reflection grating structure to further enhance the quantum efficiency. JPL has demonstrated wavelength control by progressively growing material and fabricating devices structures that have continuously increased in LWIR response. The most recent devices exhibit peak responsivity out to 8.1 microns. Peak detectivity of the 8.1 µm devices has reached ~ 1 × 1010 Jones at 77 K. Furthermore, we have fabricated the first long-wavelength 640×512 pixels QDIP focal plane array. This QDIP focal plane array has produced excellent infrared imagery with noise equivalent temperature difference of 40 mK at 60K operating temperature. In addition, we have managed to increase the quantum efficiency of these devices from 0.1% [1-2] to 20% in discrete devices. This is a factor of 200 increase in quantum efficiency. With these excellent results, for the first time QDIP performance has surpassed the QWIP performance. Our goal is to operate these long-wavelength detectors at much higher operating temperature than 77K, which can be passively achieved in space. This will be a huge leap in high performance infrared detectors specifically applicable to space science instruments.