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Dive into the research topics where Jean R. Vatus is active.

Publication


Featured researches published by Jean R. Vatus.


Archive | 2003

Apparatuses and methods for forming a substantially facet-free epitaxial film

Jean R. Vatus; Lance A. Scudder; Paul B. Comita


Archive | 2006

Pre-cleaning of substrates in epitaxy chambers

Yihwan Kim; Jean R. Vatus; Lori D. Washington; Arkadii V. Samoilov; Ali Zojaji


Archive | 2007

Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects

Kailash Kiran Patalay; Craig Metzner; Jean R. Vatus


Archive | 2013

System and method for pedestal adjustment

Richard O. Collins; Kailash Kiran Patalay; Jean R. Vatus; Zhepeng Cong


Archive | 2008

METHOD AND APPARATUS TO ENHANCE PROCESS GAS TEMPERATURE IN A CVD REACTOR

Jean R. Vatus; Kailash Kiran Patalay


Archive | 2003

Method of calibrating and using a semiconductor processing system

Jean R. Vatus; David K. Carlson; Arkadii V. Samoilov; Lance A. Scudder; Paul B. Comita; Annie A. Karpati


Archive | 2008

Non-contact substrate support position sensing system and corresponding adjustments

Kailash Kiran Patalay; Richard O. Collins; Jean R. Vatus; Zhepeng Cong


Archive | 2010

Methods for depositing layers having reduced interfacial contamination

Jean R. Vatus; Jinsong Tang; Yihwan Kim; Satheesh Kuppurao; Errol Antonio C. Sanchez


Archive | 2008

METHODS AND APPARATUS FOR IMPROVED AZIMUTHAL THERMAL UNIFORMITY OF A SUBSTRATE

Kailash Kiran Patalay; Jean R. Vatus; Dean Berlin


Archive | 2008

Apparatus for improved azimuthal thermal uniformity of a substrate

Kailash Kiran Patalay; Jean R. Vatus; Dean Berlin

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