Kailash Kiran Patalay

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Featured researches published by Kailash Kiran Patalay.

Archive | 2007

Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems

David K. Carlson; Satheesh Kuppurao; Howard Beckford; Herman Diniz; Kailash Kiran Patalay; Brian H. Burrows; Jeffrey Campbell; Zouming Zhu; Xiaowei Li; Errol Antonio C. Sanchez

Archive | 2008

Semiconductor process chamber vision and monitoring system

Kailash Kiran Patalay; Craig Metzner; David K. Carlson

Archive | 2006

Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects

Juan M. Chacin; Roger N. Anderson; Kailash Kiran Patalay; Craig Metzner

Archive | 2012

Use of infrared camera for real-time temperature monitoring and control

Nir Merry; Stephen Moffatt; Kailash Kiran Patalay; David K. Carlson

Archive | 2008

Pyrometry for substrate processing

Kailash Kiran Patalay; Aaron Muir Hunter; Bruce E. Adams

Archive | 2007

Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects

Kailash Kiran Patalay; Craig Metzner; Jean R. Vatus

Archive | 2013

System and method for pedestal adjustment

Richard O. Collins; Kailash Kiran Patalay; Jean R. Vatus; Zhepeng Cong

Archive | 2009

Cvd reactor with multiple processing levels and dual-axis motorized lift mechanism

Richard O. Collins; Nyi O. Myo; Kevin Joseph Bautista; John S. Webb; Errol C. Sanchez; Yi-Chiau Huang; Kailash Kiran Patalay; Zhi Yuan Zhou; Wilson Yu

Archive | 2008

METHOD AND APPARATUS TO ENHANCE PROCESS GAS TEMPERATURE IN A CVD REACTOR

Jean R. Vatus; Kailash Kiran Patalay

Archive | 2012

APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE

Errol Antonio C. Sanchez; Richard O. Collins; David K. Carlson; Kevin Joseph Bautista; Herman Diniz; Kailash Kiran Patalay; Nyi O. Myo; Dennis L. Demars; Christophe Marcadal; Steve Jumper; Satheesh Kuppurao

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