Jens Patommel

Hard x-ray nanobeam characterization by coherent diffraction microscopy

We have carried out a ptychographic scanning coherent diffraction imaging experiment on a test object in order to characterize the hard x-ray nanobeam in a scanning x-ray microscope. In addition to a high resolution image of the test object, a detailed quantitative picture of the complex wave field in the nanofocus is obtained with high spatial resolution and dynamic range. Both are the result of high statistics due to the large number of diffraction patterns. The method yields a complete description of the focus, is robust against inaccuracies in sample positioning, and requires no particular shape or prior knowledge of the test object.

Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes

We demonstrate x-ray scanning coherent diffraction microscopy (ptychography) with 10 nm spatial resolution, clearly exceeding the resolution limits of conventional hard x-ray microscopy. The spatial resolution in a ptychogram is shown to depend on the shape (structure factor) of a feature and can vary for different features in the object. In addition, the resolution and contrast are shown to increase with increasing coherent fluence. For an optimal ptychographic x-ray microscope, this implies a source with highest possible brilliance and an x-ray optic with a large numerical aperture to generate the optimal probe beam.

Full spatial characterization of a nanofocused x-ray free-electron laser beam by ptychographic imaging

The emergence of hard X-ray free electron lasers (XFELs) enables new insights into many fields of science. These new sources provide short, highly intense, and coherent X-ray pulses. In a variety of scientific applications these pulses need to be strongly focused. In this article, we demonstrate focusing of hard X-ray FEL pulses to 125 nm using refractive x-ray optics. For a quantitative analysis of most experiments, the wave field or at least the intensity distribution illuminating the sample is needed. We report on the full characterization of a nanofocused XFEL beam by ptychographic imaging, giving access to the complex wave field in the nanofocus. From these data, we obtain the full caustic of the beam, identify the aberrations of the optic, and determine the wave field for individual pulses. This information is for example crucial for high-resolution imaging, creating matter in extreme conditions, and nonlinear x-ray optics.

Hard X-ray nanoprobe at beamline P06 at PETRA III

We describe the hard X-ray scanning microscope planned for the new synchrotron radiation source PETRA III at DESY in Hamburg, Germany. It is based on nanofocusing refractive X-ray lenses and is designed for two-dimensional mapping and scanning tomography. It supports X-ray fluorescence and (coherent) diffraction contrast, yielding elemental and structural information from inside the sample. Spatial resolutions down to well below 50 nm are aimed for in direct space. A further increase in spatial resolution is expected by applying ptychographic scanning schemes. The optical scheme with a two-stage focusing optic is described.

Scanning x-ray diffraction with 200nm spatial resolution

We report a scanning technique, which combines high resolution x-ray diffraction (in reciprocal space) along with a submicrometer spatial resolution (in real space). SiGe∕Si(001) Stranski–Krastanow islands served here as a well investigated model system to check the limits of the developed method. A set of refractive silicon x-ray lenses focused the x-ray beam size down to a diameter of 200nm (full width at half maximum), which enables scanning of individual micrometer-sized and even smaller islands. By illuminating diverse {111} island side facets, crystal truncation rods of different orientations were independently excited and thus became distinguishable in the scattering patterns. The reassembling of these locally resolved diffraction patterns coincides with both an integral measurement and a corresponding scattering simulation.

Full optical characterization of coherent x-ray nanobeams by ptychographic imaging.

Scanning coherent diffraction microscopy (ptychography) is an emerging hard x-ray microscopy technique that yields spatial resolutions well below the lateral size of the probing nanobeam. Besides a high resolution image of the object, the complex wave field of the probe can be reconstructed at the position of the object. By verifying the consistency of several independent wave field measurements along the optical axis, we address the question of how well the reconstruction represents the nanobeam. With a single ptychogram the wave field can be properly determined over a large range along the optical axis, also at positions inaccessible otherwise.

Non‐destructive and quantitative imaging of a nano‐structured microchip by ptychographic hard X‐ray scanning microscopy

We used hard X‐ray scanning microscopy with ptychographic coherent diffraction contrast to image a front‐end processed passivated microchip fabricated in 80 nm technology. No sample preparation was needed to image buried interconnects and contact layers with a spatial resolution of slightly better than 40 nm. The phase shift in the sample is obtained quantitatively. With the additional knowledge of the elemental composition determined in parallel by X‐ray fluorescence mapping, quantitative information about specific nanostructures is obtained. A significant enhancement in signal‐to‐noise ratio and spatial resolution is achieved compared to conventional hard X‐ray scanning microscopy.

Imaging Shock Waves in Diamond with Both High Temporal and Spatial Resolution at an XFEL

The advent of hard x-ray free-electron lasers (XFELs) has opened up a variety of scientific opportunities in areas as diverse as atomic physics, plasma physics, nonlinear optics in the x-ray range, and protein crystallography. In this article, we access a new field of science by measuring quantitatively the local bulk properties and dynamics of matter under extreme conditions, in this case by using the short XFEL pulse to image an elastic compression wave in diamond. The elastic wave was initiated by an intense optical laser pulse and was imaged at different delay times after the optical pump pulse using magnified x-ray phase-contrast imaging. The temporal evolution of the shock wave can be monitored, yielding detailed information on shock dynamics, such as the shock velocity, the shock front width, and the local compression of the material. The method provides a quantitative perspective on the state of matter in extreme conditions.

High-resolution chemical imaging of gold nanoparticles using hard x-ray ptychography

We combine resonant scattering with (ptychographic) scanning coherent diffraction microscopy to determine the chemical state of gold nanoparticles with high spatial resolution. Ptychographic images of the sample are recorded for a series of energies around the gold L3 absorption edge. From these data, chemical information in the form of absorption and resonant scattering spectra is reconstructed at each location in the sample. For gold nanoparticles of about 100 nm diameter, a spatial resolution of about 20–30 nm is obtained. In the future, this microscopy approach will open the way to operando studies of heterogeneous catalysts on the nanometer scale.

Full-field X-ray microscopy with crossed partial multilayer Laue lenses

We demonstrate full-field X-ray microscopy using crossed multilayer Laue lenses (MLL). Two partial MLLs are prepared out of a 48 μm high multilayer stack consisting of 2451 alternating zones of WSi2 and Si. They are assembled perpendicularly in series to obtain two-dimensional imaging. Experiments are done in a laboratory X-ray microscope using Cu-Kα radiation (E = 8.05 keV, focal length f = 8.0 mm). Sub-100 nm resolution is demonstrated without mixed-order imaging at an appropriate position of the image plane. Although existing deviations from design parameters still cause aberrations, MLLs are a promising approach to realize hard X-ray microscopy at high efficiencies with resolutions down to the sub-10 nm range in future.