Jens Popp

Process development support environment: a tool suite to engineer manufacturing sequences

This paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of MEMS based on semiconductor thin film process technologies. For this purpose the current development practices are described, issues arising from the current practices are extracted and ways to approach these issues are highlighted. Solutions to several of these problems are provided by a software tool suite called XperiDesk. This suite results from a three year project funded by the European Commission under the 6th framework programme. The project called PROMENADE European Commission resulted in prototype software tools which are currently in a maturity phase and will be released as XperiDesk product suite.

Optimization of MEMS fabrication process design by virtual experiments

Fabrication processes for MEMS are characterized by a variety of different process technologies and materials. Unlike in microelectronics the fabrication process is relevant to all design stages within the design flow. Discovering the correct combination of process steps, materials and process parameters usually requires a large number of experiments. This paper presents a new software system that supports the MEMS designers in managing their process knowledge and in performing virtual experiments using SILVACO TCAD tools.

MEMS fabrication process management environment

New microfabrication technologies in the MEMS domain require novel approaches in computer aided design. Process issues in these technologies affecting the design are becoming increasingly important and Process information held in static design rule sets will be no longer sufficient. This paper describes the methodology and the implementation of a process management system that supports the designer in configuring application specific process flows with predictable properties.

CAD tool environment for MEMS process design support

MEMS fabrication processes are characterized by a numerous useable process steps, materials and effects to fabricate the intended microstructure. Up to now CAD support in this domain concentrates mainly on the structural design (e.g. simulation programs on FEM basis). These tools often assume fixed interfaces to fabrication process like material parameters or design rules. Taking into account that MEMS design requires concurrently structural design (defining the lateral 2-dim shapes) as well as process design (responsible for the third dimension) it turns out that technology interfaces consisting only of sets of static data are no longer sufficient. For successful design flows in these areas it is necessary to incorporate a higher degree of process related data. A broader interface between process configuration on the one side and the application design on the other side seems to be needed. This paper proposes a novel approach. A process management system is introduced. It allows the specification of processes for specific applications. The system is based on a dedicated database environment that is able to store and manage all process related design constraints linked to the fabrication process data itself. The interdependencies between application specific processes and all stages of the design flow will be discussed and the complete software system PRINCE will be introduced meeting the requirements of this new approach. Based on a concurrent design methodology presented in the beginning of this paper, a system is presented that supports application specific process design. The paper will highlight the incorporated tools and the present status of the software system. A complete configuration of an Si-thin film process example will demonstrate the usage of PRINCE.

Sampling process information from unstructured data

Process Data Management and information governance are important tasks in product engineering. Formal process descriptions, quick access to technology data, check for consistent process flows, and the easy reuse of technology data are the main drivers of these developments. This paper introduces new methods for systematically collecting and storing technology data preserving the multidimensional context in which it had been created. Furthermore new methods and tools are introduced reconstructing the context of historical data, therefore creating information from the “heap”.

Comprehensive design and process flow configuration for micro and nano tech devices

The development of micro and nano tech devices based on semiconductor manufacturing processes comprises the structural design as well as the definition of the manufacturing process flow. The approach is characterized by application specific fabrication flows, i.e. fabrication processes (built up by a large variety of process steps and materials) depending on the later product. Technology constraints have a great impact on the device design and vice-versa. In this paper we introduce a comprehensive methodology and based on that an environment for customer-oriented product engineering of MEMS products. The development is currently carried out in an international multi-site research project.

Management and verification for MEMS fabrication processes

In MEMS design many different fabrication techniques and materials are involved and the strong dependency between microstructure and fabrication process leads to application specific fabrication processes. A comprehensive management of process knowledge is required to take into account the various interdependencies and constraints occurring within a MEMS fabrication process. This paper presents an environment for the management of process knowledge and provides support for the design and verification of application specific fabrication processes.

Process design and tracking support for MEMS

A MEMS process design, development and tracking system is presented. It allows the specification of processes for specific applications and the tracking of the development procedures. The system consists of several components. Based on a comprehensive database that is able to store and manage all process related design constraint data as well as development related data linked to the fabrication process itself. A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently the software environment, called PROMENADE, will be introduced meeting the requirements of this process approach.

Technology interfaces to microsystem and nanoelectronic processes

A process management and development system for MEMS design is introduced. It allows the specification of processes for specific applications and the tracking of the development procedures. The system is based on a dedicated database environment that is able to store and manage all process related design constraints and development related data linked to the fabrication process data itself. The interdependencies between application specific processes and all stages of the design flow will be discussed and a software system will be introduced meeting the requirements of this new approach. Although initially dedicated to microsystem processes this environment may also support nanoelectronic fabrication technologies.

MEMS product engineering: methodology and tools

The development of MEMS comprises the structural design as well as the definition of an appropriate manufacturing process. Technology constraints have a considerable impact on the device design and vice-versa. Product design and technology development are therefore concurrent tasks. Based on a comprehensive methodology the authors introduce a software environment that links commercial design tools from both area into a common design flow. In this paper emphasis is put on automatic low threshold data acquisition. The intention is to collect and categorize development data for further developments with minimum overhead and minimum disturbance of established business processes. As a first step software tools that automatically extract data from spreadsheets or file-systems and put them in context with existing information are presented. The developments are currently carried out in a European research project.