Jesper Wittborn

Terahertz near-field nanoscopy of mobile carriers in single semiconductor nanodevices.

We introduce ultraresolving terahertz (THz) near-field microscopy based on THz scattering at atomic force microscope tips. Nanoscale resolution is achieved by THz field confinement at the very tip apex to within 30 nm, which is in good agreement with full electro-dynamic calculations. Imaging semiconductor transistors, we provide first evidence of 40 nm (lambda/3000) spatial resolution at 2.54 THz (wavelength lambda=118 microm) and demonstrate the simultaneous THz recognition of materials and mobile carriers in a single nanodevice. Fundamentally important, we find that the mobile carrier contrast can be directly related to near-field excitation of THz-plasmons in the doped semiconductor regions. This opens the door to quantitative studies of local carrier concentration and mobility at the nanometer scale. The THz near-field response is extraordinary sensitive, providing contrast from less than 100 mobile electrons in the probed volume. Future improvements could allow for THz characterization of even single electrons or biomolecules.

Infrared-spectroscopic nanoimaging with a thermal source

Fourier-transform infrared (FTIR) spectroscopy is a widely used analytical tool for chemical identification of inorganic, organic and biomedical materials, as well as for exploring conduction phenomena. Because of the diffraction limit, however, conventional FTIR cannot be applied for nanoscale imaging. Here we demonstrate a novel FTIR system that allows for infrared-spectroscopic nanoimaging of dielectric properties (nano-FTIR). Based on superfocusing of thermal radiation with an infrared antenna, detection of the scattered light, and strong signal enhancement employing an asymmetric FTIR spectrometer, we improve the spatial resolution of conventional infrared spectroscopy by more than two orders of magnitude. By mapping a semiconductor device, we demonstrate spectroscopic identification of silicon oxides and quantification of the free-carrier concentration in doped Si regions with a spatial resolution better than 100  nm. We envisage nano-FTIR becoming a powerful tool for chemical identification of nanomaterials, as well as for quantitative and contact-free measurement of the local free-carrier concentration and mobility in doped nanostructures.

Infrared spectroscopic near-field mapping of single nanotransistors.

We demonstrate the application of scattering-type scanning near-field optical microscopy (s-SNOM) for infrared (IR) spectroscopic material recognition in state-of-the-art semiconductor devices. In particular, we employ s-SNOM for imaging of industrial CMOS transistors with a resolution better than 20 nm, which allows for the first time IR spectroscopic recognition of amorphous SiO(2) and Si(3)N(4) components in a single transistor device. The experimentally recorded near-field spectral signature of amorphous SiO(2) shows excellent agreement with model calculations based on literature dielectric values, verifying that the characteristic near-field contrasts of SiO(2) stem from a phonon-polariton resonant near-field interaction between the probing tip and the SiO(2) nanostructures. Local material recognition by s-SNOM in combination with its capabilities of contact-free and non-invasive conductivity- and strain-mapping makes IR near-field microscopy a versatile metrology technique for nanoscale material characterization and semiconductor device analysis with application potential in research and development, failure analysis and reverse engineering.

Quantitative, nanoscale free-carrier concentration mapping using terahertz near-field nanoscopy

We use ultra-resolving terahertz (THz) near-field microscopy based on THz scattering at atomic force microscope tips to analyze 65-nm technology node transistors. Nanoscale resolution is achieved by THz field confinement at the very tip apex to within 30 nm. Images of semiconductor transistors provide evidence of 40 nm (λ/3000) spatial resolution at 2.54 THz (wavelength λ = 118µm) and demonstrate the simultaneous THz recognition of materials and mobile carriers in a single nanodevice. The mobile carrier contrast can be clearly related to near-field excitation of THz-plasmons in the semiconductor regions. The extraordinary high sensitivity of our microscope provides THz near-field contrasts from less than 100 mobile electrons in the probed volume.

THz scattering-type near-field microscopy of semiconductor conductivity and mobility

Ultrahigh-resolution (40 nm) near-field microscopy was demonstrated using 2.5 THz illumination, at 118 µm wavelength [1]. This was made possible by the extreme THz field concentration at the metallic probe tip. The THz nanoscope thus exceeds the diffraction limit of resolution by a factor of 2000. Its 40 nm resolving power matches the needs of modern nanoscience and technology.

Infrared Mapping of Material and Doping Contrasts in Microelectronic Devices at Nanoscale Spatial Resolution

In this paper we demonstrate that infrared scattering-type scanning near-field optical microscopy (s-SNOM) allows mapping of different materials and electron concentrations in cross-sectional samples of industrial integrated circuit device structures at nanoscale spatial resolution.