Jiamiao Yang

Laser differential reflection-confocal focal-length measurement

A new laser differential reflection-confocal focal-length measurement (DRCFM) method is proposed for the high-accuracy measurement of the lens focal length. DRCFM uses weak light reflected from the lens last surface to determine the vertex position of this surface. Differential confocal technology is then used to identify precisely the lens focus and vertex of the lens last surface, thereby enabling the precise measurement of the lens focal length. Compared with existing measurement methods, DRCFM has high accuracy and strong anti-interference capability. Theoretical analyses and experimental results indicate that the DRCFM relative measurement error is less than 10 ppm.

Measuring the lens focal length by laser reflection-confocal technology

A laser reflection-confocal focal-length measurement (LRCFM) is proposed for the high-accuracy measurement of lens focal length. LRCFM uses the peak points of confocal response curves to precisely identify the lens focus and vertex of the lens last surface. LRCFM then accurately measures the distance between the two positions to determine the lens focal length. LRCFM uses conic fitting, which significantly enhances measurement accuracy by inhibiting the influence of environmental disturbance and system noise on the measurement results. The experimental results indicate that LRCFM has a relative expanded uncertainty of less than 0.0015%. Compared with existing measurement methods, LRCFM has high accuracy and a concise structure. Thus, LRCFM is a feasible method for high-accuracy focal-length measurements.

Radius measurement by laser confocal technology

A laser confocal radius measurement (LCRM) method is proposed for high-accuracy measurement of the radius of curvature (ROC). The LCRM uses the peak points of confocal response curves to identify the cat eye and confocal positions precisely. It then accurately measures the distance between these two positions to determine the ROC. The LCRM also uses conic fitting, which significantly enhances measurement accuracy by restraining the influences of environmental disturbance and system noise on the measurement results. The experimental results indicate that LCRM has a relative expanded uncertainty of less than 10 ppm for both convex and concave spheres. Thus, LCRM is a feasible method for ROC measurements with high accuracy and concise structures.

Laser differential confocal radius measurement system.

A laser differential confocal radius measurement system with high measurement accuracy is developed for optical manufacturing and metrology. The system uses the zero-crossing point of the differential confocal intensity curve to precisely identify the cats-eye and confocal positions and uses an interferometer to measure the distance between these two positions, thereby achieving a high-precision measurement for the radius of curvature. The coaxial measuring optical path reduces the Abbe error, and the air-bearing slider reduces the motion error. The error analysis indicates the theoretical accuracy of the system is up to 2 ppm, and the experiment shows that the system has high focusing sensitivity and is little affected by environmental fluctuations; the measuring repeatability is between 4 and 12 ppm.

Laser differential confocal paraboloidal vertex radius measurement

This Letter proposes a laser differential confocal paraboloidal vertex radius measurement (DCPRM) method for the high-accuracy measurement of the paraboloidal vertex radius of curvature. DCPRM constructs an autocollimation vertex radius measurement light path for the paraboloid by placing a reflector in the incidence light path. This technique is based on the principle that a paraboloid can aim a parallel beam at its focus without aberration and uses differential confocal positioning technology to identify the paraboloid focus and vertex accurately. Measurement of the precise distance between these two positions is achieved to determine the paraboloid vertex radius. Preliminary experimental results indicate that DCPRM has a relative expanded uncertainty of less than 0.001%.

Laser differential confocal interference multi-parameter comprehensive measurement method and its system for spherical lens

Different measurement methods have been used to achieve different parameter measurements of a spherical lens, and multi-parameter measurements of a spherical lens have low measurement accuracy and efficiency. This paper proposes a new, laser differential confocal interference multi-parameter measurement (DCIMPM) method for spherical lens. Based on this proposed DCIMPM, a multi-parameter comprehensive measurement system is developed for spherical lens, which uses the laser differential confocal parameter measurement technique to measure the radius of curvature, thickness, and refractivity of spherical lens, and uses the laser interference measurement technique to measure the surface figure of a spherical lens. Therefore, the DCIMPM system, for the first time, achieves high-accuracy multi-parameter comprehensive measurements of a spherical lens on a single instrument. Experiments indicate that the developed DCIMPM system can achieve a measurement accuracy of 5 × 10-6 for the lens radius, 2.5 × 10-4 for the lens thickness, 2.2 × 10-4 for the lens refractivity, and a peak to valley of λ/20 for the surface figure of the lens. The proposed DCIMPM principle and developed system provide a new approach to achieve multi-parameter comprehensive measurements for spherical lens.

High-precision radius automatic measurement using laser differential confocal technology

A high precision radius automatic measurement method using laser differential confocal technology is proposed. Based on the property of an axial intensity curve that the null point precisely corresponds to the focus of the objective and the bipolar property, the method uses the composite PID (proportional-integral-derivative) control to ensure the steady movement of the motor for process of quick-trigger scanning, and uses least-squares linear fitting to obtain the position of the cat-eye and confocal positions, then calculates the radius of curvature of lens. By setting the number of measure times, precision auto-repeat measurement of the radius of curvature is achieved. The experiment indicates that the method has the measurement accuracy of better than 2 ppm, and the measuring repeatability is better than 0.05 μm. In comparison with the existing manual-single measurement, this method has a high measurement precision, a strong environment anti-interference capability, a better measuring repeatability which is only tenth of former’s.

Measuring the lens focal length by laser confocal technique

A new laser confocal focal-length measurement (LCFM) is proposed for the high-accuracy measurement of lens back focal length. LCFM uses the peak point of confocal response curve to precisely identify the lens focus, and uses the elastic contact between reflector R and the lens last surface to determine the test lens last vertex. The distance between the reflectors on these two positions is then measured by a laser distance interferometer, and then the accurate back focal-length of test lens is obtained. Compared with existing methods, LCFM significantly improves the measurement accuracy and simplifies the system structure by laser confocal technique, and reduces the product development cost. LCFM is especially suitable for the back focal-length measurement of large aperture lens.

A data processing method based on tracking light spot for the laser differential confocal component parameters measurement system

We have proposed the component parameters measuring method based on the differential confocal focusing theory. In order to improve the positioning precision of the laser differential confocal component parameters measurement system (LDDCPMS), the paper provides a data processing method based on tracking light spot. To reduce the error caused by the light point moving in collecting the axial intensity signal, the image centroiding algorithm is used to find and track the center of Airy disk of the images collected by the laser differential confocal system. For weakening the influence of higher harmonic noises during the measurement, Gaussian filter is used to process the axial intensity signal. Ultimately the zero point corresponding to the focus of the objective in a differential confocal system is achieved by linear fitting for the differential confocal axial intensity data. Preliminary experiments indicate that the method based on tracking light spot can accurately collect the axial intensity response signal of the virtual pinhole, and improve the anti-interference ability of system. Thus it improves the system positioning accuracy.