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Jill Svenja Becker

Ultratech, Inc.

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Publication

Featured researches published by Jill Svenja Becker.

Archive | 2009

Plasma atomic layer deposition system and method

Jill Svenja Becker; Roger R. Coutu; Douwe J. Monsma

Archive | 2009

System and method for thin film deposition

Jill Svenja Becker; Roger R. Coutu; Douwe J. Monsma

Archive | 2011

Ald coating system

Michael J. Sershen; Ganesh Sundaram; Roger R. Coutu; Jill Svenja Becker; Mark J. Dalberth

Archive | 2009

Reaction chamber with removable liner

Roger R. Coutu; Jill Svenja Becker; Douwe J. Monsma

220th ECS Meeting | 2011

Atomic Layer Deposition of AlN with Tris(Dimethylamido)Aluminum and NH3

Guo Liu; Eric Deguns; Laurent Lecordier; Ganesh Sundaram; Jill Svenja Becker

Meeting Abstracts | 2008

Leading Edge Atomic Layer Deposition Applications

Ganesh Sundaram; Douwe J. Monsma; Jill Svenja Becker

Archive | 2010

Ald systems and methods

Roger R. Coutu; Jill Svenja Becker; Ganesh Sundaram; Eric Deguns

218th ECS Meeting | 2010

Invited) Large Format Atomic Layer Deposition

Ganesh Sundaram; Adam Bertuch; Ritwik Bhatia; Roger R. Coutu; Mark J. Dalberth; Eric Deguns; Guo Liu; Mark J. Sowa; Jill Svenja Becker

Meeting Abstracts | 2010

Large Format Atomic Layer Deposition

Ganesh Sundaram; Adam Bertuch; Ritwik Bhatia; Mark J. Dalberth; Eric Deguns; Guo Liu; Mark J. Sowa; Jill Svenja Becker

218th ECS Meeting | 2010

Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor

Eric Deguns; Mark J. Sowa; Mark J. Dalberth; Ritwik Bhatia; Ravi Kanjolia; Dan Moser; Ganesh Sundaram; Jill Svenja Becker

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Collaboration

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Ganesh Sundaram

Ultratech

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Roger R. Coutu

Ultratech

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Mark J. Dalberth

Ultratech

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Mark J. Sowa

Ultratech

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Ritwik Bhatia

Ultratech

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Adam Bertuch

Ultratech

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Michael J. Sershen

Ultratech

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Ravi Kanjolia

Sigma-Aldrich

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Mark Saly

Applied Materials

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