Jincheng Ni

High efficiency integration of three-dimensional functional microdevices inside a microfluidic chip by using femtosecond laser multifoci parallel microfabrication.

High efficiency fabrication and integration of three-dimension (3D) functional devices in Lab-on-a-chip systems are crucial for microfluidic applications. Here, a spatial light modulator (SLM)-based multifoci parallel femtosecond laser scanning technology was proposed to integrate microstructures inside a given ‘Y’ shape microchannel. The key novelty of our approach lies on rapidly integrating 3D microdevices inside a microchip for the first time, which significantly reduces the fabrication time. The high quality integration of various 2D-3D microstructures was ensured by quantitatively optimizing the experimental conditions including prebaking time, laser power and developing time. To verify the designable and versatile capability of this method for integrating functional 3D microdevices in microchannel, a series of microfilters with adjustable pore sizes from 12.2 μm to 6.7 μm were fabricated to demonstrate selective filtering of the polystyrene (PS) particles and cancer cells with different sizes. The filter can be cleaned by reversing the flow and reused for many times. This technology will advance the fabrication technique of 3D integrated microfluidic and optofluidic chips.

Three-dimensional chiral microstructures fabricated by structured optical vortices in isotropic material

Optical vortices, a type of structured beam with helical phase wavefronts and ‘doughnut’-shaped intensity distributions, have been used to fabricate chiral structures in metals and spiral patterns in anisotropic polarization-dependent azobenzene polymers. However, in isotropic polymers, the fabricated microstructures are typically confined to non-chiral cylindrical geometry due to the two-dimensional ‘doughnut’-shaped intensity profile of the optical vortices. Here we develop a powerful strategy to realize chiral microstructures in isotropic material by coaxial interference of a vortex beam and a plane wave, which produces three-dimensional (3D) spiral optical fields. These coaxial interference beams are generated by designing contrivable holograms consisting of an azimuthal phase and an equiphase loaded on a liquid-crystal spatial light modulator. In isotropic polymers, 3D chiral microstructures are achieved under illumination using coaxial interference femtosecond laser beams with their chirality controlled by the topological charge. Our further investigation reveals that the spiral lobes and chirality are caused by interfering patterns and helical phase wavefronts, respectively. This technique is simple, stable and easy to perform, and it offers broad applications in optical tweezers, optical communications and fast metamaterial fabrication.

An improved multi-exposure approach for high quality holographic femtosecond laser patterning

High efficiency two photon polymerization through single exposure via spatial light modulator (SLM) has been used to decrease the fabrication time and rapidly realize various micro/nanostructures, but the surface quality remains a big problem due to the speckle noise of optical intensity distribution at the defocused plane. Here, a multi-exposure approach which used tens of computer generate holograms successively loaded on SLM is presented to significantly improve the optical uniformity without losing efficiency. By applying multi-exposure, we found that the uniformity at the defocused plane was increased from ∼0.02 to ∼0.6 according to our simulation. The fabricated two series of letters “HELLO” and “USTC” under single-and multi-exposure in our experiment also verified that the surface quality was greatly improved. Moreover, by this method, several kinds of beam splitters with high quality, e.g., 2 × 2, 5 × 5 Daman, and complex nonseperate 5 × 5, gratings were fabricated with both of high quality and short time (<1 min, 95% time-saving). This multi-exposure SLM-two-photon polymerization method showed the promising prospect in rapidly fabricating and integrating various binary optical devices and their systems.

Optimized holographic femtosecond laser patterning method towards rapid integration of high-quality functional devices in microchannels

Rapid integration of high-quality functional devices in microchannels is in highly demand for miniature lab-on-a-chip applications. This paper demonstrates the embellishment of existing microfluidic devices with integrated micropatterns via femtosecond laser MRAF-based holographic patterning (MHP) microfabrication, which proves two-photon polymerization (TPP) based on spatial light modulator (SLM) to be a rapid and powerful technology for chip functionalization. Optimized mixed region amplitude freedom (MRAF) algorithm has been used to generate high-quality shaped focus field. Base on the optimized parameters, a single-exposure approach is developed to fabricate 200 × 200 μm microstructure arrays in less than 240 ms. Moreover, microtraps, QR code and letters are integrated into a microdevice by the advanced method for particles capture and device identification. These results indicate that such a holographic laser embellishment of microfluidic devices is simple, flexible and easy to access, which has great potential in lab-on-a-chip applications of biological culture, chemical analyses and optofluidic devices.

Arch-like microsorters with multi-modal and clogging-improved filtering functions by using femtosecond laser multifocal parallel microfabrication

Conventional micropore membranes based size sorting have been widely applied for single-cell analysis. However, only a single filtering size can be achieved and the clogging issue cannot be completely avoided. Here, we propose a novel arch-like microsorter capable of multimodal (high-, band- and low-capture mode) sorting of particles. The target particles can pass through the front filter and are then trapped by the back filter, while the non-target particles can bypass or pass through the microsorter. This 3D arch-like microstructures are fabricated inside a microchannel by femtosecond laser parallel multifocal scanning. The designed architecture allows for particles isolation free of clogging over 20 minutes. Finally, as a proof of concept demonstration, SUM159 breast cancer cells are successfully separated from whole blood.

Optical superimposed vortex beams generated by integrated holographic plates with blazed grating

In this paper, we demonstrate that the superposition of two vortex beams with controlled topological charges can be realized by integrating two holographic plates with blazed grating. First, the holographic plate with blazed grating was designed and fabricated by laser direct writing for generating well-separated vortex beam. Then, the relationship between the periods of blazed grating and the discrete angles of vortex beams was systemically investigated. Finally, through setting the discrete angle and different revolving direction of the holographic plates, the composite fork-shaped field was realized by the superposition of two vortex beams in a particular position. The topological charges of composite fork-shaped field (l = 1, 0, 3, and 4) depend on the topological charges of compositional vortex beams, which are well agreed with the theoretical simulation. The method opens up a wide range of opportunities and possibilities for applying in optical communication, optical manipulations, and photonic inte...

Mechanical-Tunable Capillary-Force-Driven Self-Assembled Hierarchical Structures on Soft Substrate

Capillary-force-driven self-assembly (CFSA) has been combined with many top-down fabrication methods to be alternatives to conventional single micro/nano manufacturing techniques for constructing complicated micro/nanostructures. However, most CFSA structures are fabricated on a rigid substrate, and little attention is paid to the tuning of CFSA, which means that the pattern of structures cannot be regulated once they are manufactured. Here, by combining femtosecond laser direct writing with CFSA, a flexible method is proposed to fabricate self-assembled hierarchical structures on a soft substrate. Then, the tuning of the self-assembly process is realized with a mechanical-stretching strategy. With this method, different patterns of tunable self-assembled structures are obtained before tuning and after release, which is difficult to achieve with other techniques. In addition, as a proof-of-concept application, this mechanical tunable self-assembly of microstructures on a soft substrate is used for smart displays and versatile micro-object trapping.

Microtubes with complex cross-section fabricated by C-shaped Bessel laser beam for mimicking stomata that opens and closes rapidly

This article presents a new method for fabricating complex cross-sectional microtubes with a high aspect ratio at micro/nanoscale. The microtubes are directly written in a photoresist using a femtosecond pulsed laser combined with a spatial light modulator (SLM). A new method for generating a C-shaped Bessel beam by modifying the Bessel beams with a SLM is reported for the first time. Using this gap-ring-shaped light field, microtubes with special cross section (trefoil-shaped, clover-shaped, spiral, etc.) have been first achieved through two-photo polymerization rapidly. The microtube wall can reach about 800 nm and the diameter of the gap-ring structure is only a few micrometers. As a demonstration, artificial stomata were manufactured with the same size as actual plants stomata consisting of gap-ring microtubes. This artificial stomata can mimic the function of the real stomata with rapid opening and closing, demonstrating its ability to trap and release microparticles regulated by rinse solvent.

Dimension‐Controllable Microtube Arrays by Dynamic Holographic Processing as 3D Yeast Culture Scaffolds for Asymmetrical Growth Regulation

Transparent microtubes can function as unique cell culture scaffolds, because the tubular 3D microenvironment they provide is very similar to the narrow space of capillaries in vivo. However, how to realize the fabrication of microtube-arrays with variable cross-section dynamically remains challenging. Here, a dynamic holographic processing method for producing high aspect ratio (≈20) microtubes with tunable outside diameter (6-16 µm) and inside diameter (1-10 µm) as yeast culture scaffolds is reported. A ring-structure Bessel beam is modulated from a typical Gaussian-distributed femtosecond laser beam by a spatial light modulator. By combining the axial scanning of the focused beam and the dynamic display of holograms, dimension-controllable microtube arrays (straight, conical, and drum-shape) are rapidly produced by two-photon polymerization. The outside and inside diameters, tube heights, and spatial arrangements are readily tuned by loading different computer-generated holograms and changing the processing parameters. The transparent microtube array as a nontrivial tool for capturing and culturing the budding yeasts reveals the significant effect of tube diameter on budding characteristics. In particular, the conical tube with the inside diameter varying from 5 to 10 µm has remarkable asymmetrical regulation on the growth trend of captured yeasts.

Femtosecond Laser Direct Ablating Micro/Nanostructures and Micropatterns on CH3NH3 PbI3 Single Crystal

Single crystal perovskite materials with the intriguing properties of wide optical absorption range, low trap density, photoluminescence, and superior charge-transfer have emerged as a new class of revolutionary photovoltaic semiconductors promising for various applications. A technique to realize microstructures or microdevices on the surface of single crystal can facilitate the incorporation of these materials into optoelectronic applications. Here, we first reported the fabrication of 1-D mciropores, microlines, and 2-D micropatterns such as word “USTC,” number “2016” and “Olympic rings” on the surface of CH3NH3 PbI3 single crystal by femtosecond laser ablating. The effect of parameters such as exposure time, laser peak intensity, and scanning speed was quantitatively investigated to determine the parameter intervals capable of ensuring the required resolution. By fabricating periodic grating microstructures, the perovskite surfaces showed bright iridescence from dark blue to red due to the grating diffraction effect. Moreover, it is found that the fluorescence peak strength of processed area obviously grows with laser peak intensity and scanning speed, which is attributed to the increasing surface roughness caused by higher laser peak intensity and slower scanning speed. These works are beneficial for researchers to better understand the intrinsic property of single crystal perovskite and accelerate perovskite-based optoelectronics applications.