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Featured researches published by Jinok Moon.


ACS Applied Materials & Interfaces | 2014

Role of the surface chemistry of ceria surfaces on silicate adsorption.

Jihoon Seo; Jung Woo Lee; Jinok Moon; Wolfgang M. Sigmund; Ungyu Paik

Ceria nanoparticles (NPs) have been widely explored as a promising material in various fields. As synthesized under various physicochemical conditions, it exhibits the different surface chemistry. Here, the role of hydroxyl and nitrate group on ceria surface, formed under various physicochemical conditions, for the silicate adsorption was experimentally and theoretically investigated based on the adsorption isotherms and theoretical analyses using density functional theory (DFT) calculation. Experimental results acquired from adsorption isotherms with Freundlich model indicated that the nitrate group shows a much higher affinity with silicate than the hydroxyl groups. These phenomena were demonstrated through the theoretical approaches that exhibit the binding energy of the NO3-ceria (-4.383 eV) on the SiO2 surface being much higher than that of the OH-ceria (-3.813 eV). In good agreement with the experimental and the theoretical results based on adsorption properties, the results of chemical mechanical planarization (CMP) also show that the nitrate groups significantly enhance the removal of SiO2 than the hydroxyl groups. The results investigated in this study will provide researchers, studying the ceria NPs, with guidelines on the importance of exploring the surface chemistry of ceria.


Journal of Colloid and Interface Science | 2016

Size-dependent interactions of silica nanoparticles with a flat silica surface.

Jihoon Seo; Joo Hyun Kim; Myoung-Jae Lee; Jinok Moon; Dong Kee Yi; Ungyu Paik

We have investigated the surface chemistry of SiO2 nanoparticles (NPs) with different sizes and their corresponding interactions with a flat substrate of surface curvature ∼0. As the size of the NPs increases, the SiO2 surface is increasingly covered with H-bonded silanol groups, thereby increasing the ζ-potential and shifting the isoelectric point higher in pH. Interactions between the SiO2 NPs and the flat SiO2 surface were analyzed in situ using quartz crystal microbalance with dissipation (QCM-D) method, and the results were interpreted based on an extended Derjaguin-Landau-Verwey-Overbeek theory. At very low ionic strength (1mM NaCl), there was no particle adsorption onto the surface due to the highly repulsive energy barriers to this interaction. On the other hand, QCM-D results showed that the significant adsorption of SiO2 NPs onto a flat SiO2 surface occurred under conditions of high ionic strength (100mM NaCl). Interestingly, the adsorption behaviors of three different-sized SiO2 NPs on the surface varied considerably with size. SiO2 NPs with small size have high adsorption affinity with the flat SiO2 surface due to an extremely low energy barrier for the interactions, whereas relatively large SiO2 NPs have very weak adsorption affinity with the flat surface due to the repulsive energy barrier formed by the increase in the electrostatic and hydration repulsion energy.


Archive | 2002

Multi characterized chemical mechanical polishing pad and method for fabricating the same

Jinok Moon


Archive | 2000

Chemical mechanical polishing apparatus and method of using the same

Ju-hun Song; Jinok Moon


Journal of Nanoscience and Nanotechnology | 2014

Control of adhesion force between ceria particles and polishing pad in shallow trench isolation chemical mechanical planarization.

Jihoon Seo; Jinok Moon; Jae-Young Bae; Kwang Seob Yoon; Wolfgang M. Sigmund; Ungyu Paik


Applied Surface Science | 2016

Role of the oxidation state of cerium on the ceria surfaces for silicate adsorption

Jihoon Seo; Jinok Moon; Joo Hyun Kim; Kangchun Lee; Junha Hwang; Heesung Yoon; Dong Kee Yi; Ungyu Paik


Microelectronic Engineering | 2014

Effects of physico-chemical properties between poly(ethyleneimine) and silica abrasive on copper chemical mechanical planarization

Jihoon Seo; Kwang Seob Yoon; Jinok Moon; Kijung Kim; Wolfgang M. Sigmund; Ungyu Paik


Materials & Design | 2017

Multi-objective optimization of tungsten CMP slurry for advanced semiconductor manufacturing using a response surface methodology

Jihoon Seo; Joo Hyun Kim; Myoung-Jae Lee; Keungtae You; Jinok Moon; Dong-Hee Lee; Ungyu Paik


ECS Journal of Solid State Science and Technology | 2017

Highly Dispersed Fe3+-Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization

Kijung Kim; Jihoon Seo; Myeongjae Lee; Jinok Moon; Kangchun Lee; Dong Kee Yi; Ungyu Paik


ECS Journal of Solid State Science and Technology | 2017

Communication—Synergistic Effect of Mixed Particle Size on W CMP Process: Optimization Using Experimental Design

Jihoon Seo; Jinok Moon; Yehwan Kim; Kijung Kim; Kangchun Lee; Yoonsung Cho; Dong-Hee Lee; Ungyu Paik

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