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Joachim Markert

Chemnitz University of Technology

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Proceedings of SPIE | 2000

Micromirrors and micromirror arrays for scanning applications

Thomas Gessner; Steffen Kurth; Christian Kaufmann; Joachim Markert; Andreas Ehrlich; Wolfram Doetzel

The main focus of this contribution will be the description of already realized applications of micromirrors and micromirror arrays and future opportunities. As an example image projection and environmental monitoring will be discussed. The micro scanning elements where fabricated by using monocrystalline silicon and are convenient for continuous scanning with working frequencies between several 100 Hz up to 100 kHz.

Archive | 1997

Device for detecting and influencing deflection of micromechanical mirror arrangements

Manfred Dr Ing Rauch; Karsten Dipl Ing Schmidt; Wolfram Doetzel; Thomas Prof Dr Ing Gesner; Ramon Hahn; Christian Kaufmann; Kersten Kehr; Steffen Kurth; Heinz-Ulrich Dr Ing Loewe; Joachim Markert

Archive | 1996

Micromechanical optical switch

Manfred Dr Ing Rauch; Joachim Markert; Karsten Dipl Ing Schmidt; Carsten Hartig

Archive | 1995

Micromechanical mirror array for laser imaging system

Manfred Dr Ing Rauch; Wolfram Doetzel; Thomas Prof Dr Ing Gesner; Ramon Hahn; Christian Kaufmann; Heinz-Ulrich Dr Ing Loewe; Joachim Markert; Udo Wollmann

Archive | 1995

Micro-swivel-actuator in which are arranged movable strip electrodes

Manfred Dr Ing Rauch; Heinz-Ulrich Dr Ing Loewe; Wolfram Doetzel; Thomas Prof Dr Ing Gesner; Ramon Hahn; Christian Kaufmann; Joachim Markert

Archive | 1996

Pivoting micro-actuators and method for their production

Wolfram Dötzel; Thomas Gessner; Ramon Hahn; Christian Kaufmann; Heinz-Ulrich Löwe; Joachim Markert; Manfred Dr Ing Rauch; Udo Wollmann

Archive | 1997

Anordnung zur Erfassung und Beeinflussung der Auslenkung von mikromechanischen Spiegelanordnungen

Manfred Dr Ing Rauch; Karsten Dipl Ing Schmidt; Wolfram Doetzel; Thomas Prof Dr Ing Gesner; Ramon Hahn; Christian Kaufmann; Kersten Kehr; Steffen Kurth; Heinz-Ulrich Dr Ing Loewe; Joachim Markert

Archive | 1997

Anordnung zur Messung und Steuerung oder Regelung der Auslenkung von mikromechanischen Spiegelanordnungen An arrangement for measuring and controlling or regulating the deflection of the micromechanical mirror arrays

Manfred Dr Ing Rauch; Karsten Dipl Ing Schmidt; Wolfram Doetzel; Thomas Prof Dr Ing Gesner; Ramon Hahn; Christian Kaufmann; Kersten Kehr; Steffen Kurth; Heinz-Ulrich Dr Ing Loewe; Joachim Markert

Archive | 1996

Micromechanical moving device for deflecting light beams and method of fabrication thereof

Wolfram Dötzel; Thomas Gessner; Ramon Hahn; Christian Kaufmann; Heinz-Ulrich Löwe; Joachim Markert; Manfred Dr Ing Rauch; Udo Wollmann

Archive | 1995

Mikro-Schwenk-Aktuator

Manfred Dr Ing Rauch; Heinz-Ulrich Dr Ing Loewe; Wolfram Doetzel; Thomas Prof Dr Ing Gesner; Ramon Hahn; Christian Kaufmann; Joachim Markert

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Christian Kaufmann

Chemnitz University of Technology

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Ramon Hahn

Chemnitz University of Technology

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Wolfram Doetzel

Chemnitz University of Technology

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Kersten Kehr

Chemnitz University of Technology

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Wolfram Dötzel

Chemnitz University of Technology

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