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Dive into the research topics where Jochen Reinmuth is active.

Publication


Featured researches published by Jochen Reinmuth.


Archive | 2014

Micromechanical Component and Manufacturing Method for a Micromechanical Component

Arnd Kaelberer; Jochen Reinmuth; Johannes Classen


Archive | 2013

Component having a through-connection

Jochen Reinmuth; Yvonne Bergmann


Archive | 2011

Method for closing trench of e.g. microelectronic-electromechanical system component, involves applying lattice on micromechanical component over trench to be formed, and closing openings of lattice by separating filling layer on lattice

Jochen Reinmuth


Archive | 2011

MICROMECHANICAL COMPONENT HAVING A TEST STRUCTURE FOR DETERMINING THE LAYER THICKNESS OF A SPACER LAYER AND METHOD FOR MANUFACTURING SUCH A TEST STRUCTURE

Jochen Reinmuth; Ralf Boessendoerfer; Axel Franke; Mirko Hattass


Archive | 2013

Method for manufacturing a component having an electrical through-connection

Jochen Reinmuth; Jens Frey; Yvonne Bergmann


Archive | 2015

MICROMECHANICAL SENSOR DEVICE

Jens Frey; Arnd Kaelberer; Jochen Reinmuth; Johannes Classen


Archive | 2011

METHOD FOR FORMING TRENCHES IN A SEMICONDUCTOR COMPONENT

Jochen Reinmuth; Barbara Will; Heribert Weber


Archive | 2014

Herstellungsverfahren für ein mikromechanisches Bauteil

Johannes Classen; Jochen Reinmuth; Arnd Kaelberer


Archive | 2013

FLEXIBLE STOP FOR AN ACCELERATION SENSOR

Johannes Classen; Jochen Reinmuth; Guenther-Nino-Carlo Ullrich


Archive | 2012

Method for producing an electrical feedthrough in a substrate, and a substrate having an electrical feedthrough

Jochen Reinmuth; Yvonne Bergmann

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