Mirko Hattass | Researchain

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Featured researches published by Mirko Hattass.

Archive | 2013

HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF

Heribert Weber; Frank Fischer; Mirko Hattass; Yvonne Bergmann

Archive | 2013

HYBRID INTEGRATED COMPONENT

Johannes Classen; Axel Franke; Jens Frey; Heribert Weber; Frank Fischer; Patrick Wellner; Mirko Hattass; Daniel Christoph Meisel

Archive | 2011

MICROMECHANICAL COMPONENT HAVING A TEST STRUCTURE FOR DETERMINING THE LAYER THICKNESS OF A SPACER LAYER AND METHOD FOR MANUFACTURING SUCH A TEST STRUCTURE

Jochen Reinmuth; Ralf Boessendoerfer; Axel Franke; Mirko Hattass

Archive | 2010

Method for determining the sensitivity of an acceleration sensor or magnetic field sensor

Johannes Classen; Arnd Kaelberer; Hans-Joerg Faisst; Axel Franke; Mirko Hattass; Holger Rank; Robert Sattler; Alexander Buhmann; Ramona Maas; Marian Keck

Archive | 2013

HYBRIDLY INTEGRATED COMPONENT AND METHOD FOR THE PRODUCTION THEREOF

Johannes Classen; Heribert Weber; Mirko Hattass; Daniel Christoph Meisel

Archive | 2013

Drehratensensor und Verfahren zum Betrieb eines Drehratensensors

Robert Maul; Burkhard Kuhlmann; Mirko Hattass; Ralf Ameling; Benjamin Schmidt; Rolf Scheben; Thorsten Balslink

Archive | 2013

Micromechanical inertial sensor and method for manufacturing same

Johannes Classen; Mirko Hattass; Daniel Christoph Meisel

Archive | 2015

Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure

Friedjof Heuck; Ralf Reichenbach; Daniel Christoph Meisel; Lars Tebje; Mirko Hattass; Jochen Reinmuth; Torsten Kramer; Johannes Classen; Reinhard Neul; Antoine Puygranier

Archive | 2013