Jochen Zoellin

Component support and assembly having a mems component on such a component support

Component having a micromechanical microphone structure

Micromechanical pressure transducer for capacitive microelectromechanical system microphone, has substrate-sided cavity forming back volume for movable membrane, and resting at application-specific integrated circuit chip

Component having a micromechanical microphone pattern

COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE, AND METHOD FOR ITS PRODUCTION

Bauelement mit einer mikromechanischen Mikrofonstruktur

COMPONENT PART AND METHOD FOR TESTING SUCH A COMPONENT PART

MEMS component having a diaphragm structure

Micro-electro-mechanical systems component e.g. valve component, has anchorage structure setting counter-element under tensile stress so that deflections of counter-element counteract perpendicular to layer planes

Method for manufacturing microelectromechanical system element of component, involves spanning rear connection opening in substrate under membrane structure, producing cavity in substrate and opening cavity by backside thinning of substrate