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Jochen Zoellin

Bosch

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Publication

Featured researches published by Jochen Zoellin.

Archive | 2012

Component support and assembly having a mems component on such a component support

Jochen Zoellin; Ricardo Ehrenpfordt; Ulrike Scholz

Archive | 2013

Component having a micromechanical microphone structure

Jochen Zoellin; Christoph Schelling

Archive | 2007

Micromechanical pressure transducer for capacitive microelectromechanical system microphone, has substrate-sided cavity forming back volume for movable membrane, and resting at application-specific integrated circuit chip

Jochen Zoellin

Archive | 2014

Component having a micromechanical microphone pattern

Jochen Zoellin; Ricardo Ehrenpfordt; Juergen Graf; Christoph Schelling; Frederik Ante; Michael Curcic

Archive | 2010

COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE, AND METHOD FOR ITS PRODUCTION

Frank Reichenbach; Thomas Buck; Jochen Zoellin; Franz Laermer; Ulrike Scholz; Kathrin Teeffelen; Christina Leinenbach

Archive | 2014

Bauelement mit einer mikromechanischen Mikrofonstruktur

Jochen Zoellin; Christoph Schelling

Archive | 2013

COMPONENT PART AND METHOD FOR TESTING SUCH A COMPONENT PART

Jochen Zoellin; Ricardo Ehrenpfordt; Juergen Graf; Christoph Schelling; Frederik Ante; Michael Curcic

Archive | 2012

MEMS component having a diaphragm structure

Jochen Zoellin; Ricardo Ehrenpfordt; Ulrike Scholz

Archive | 2012

Micro-electro-mechanical systems component e.g. valve component, has anchorage structure setting counter-element under tensile stress so that deflections of counter-element counteract perpendicular to layer planes

Jochen Zoellin; Christoph Schelling

Archive | 2014

Method for manufacturing microelectromechanical system element of component, involves spanning rear connection opening in substrate under membrane structure, producing cavity in substrate and opening cavity by backside thinning of substrate

Jochen Zoellin; Christoph Schelling

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Collaboration

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Ricardo Ehrenpfordt

Bosch

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Christoph Schelling

Bosch

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Ulrike Scholz

Bosch

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Thomas Buck

Bosch

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Kathrin Teeffelen

Bosch

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Christina Leinenbach

Bosch

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Frank Reichenbach

Bosch

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Franz Laermer

Technische Universität München

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Frederik Ante

Bosch

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Juergen Graf

Bosch

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