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Featured researches published by Kathrin Teeffelen.


international conference on micro electro mechanical systems | 2010

A new capacitive type MEMS microphone

Christina Leinenbach; Kathrin Teeffelen; Franz Laermer; H. Seidel

A new capacitive type of MEMS microphone is presented. In contrast to existing technologies which are highly specialized for this particular type of application, our approach is based on a standard process and layer system which has been in use for more than a decade now for the manufacturing of inertial sensors. For signal conversion, a mixed-signal ASIC with digital sampling of the microphone capacitance is used. The MEMS microphone yields high signal-to-noise performance (58 dB) after mounting it in a standard LGA-type package. It is well-suited for a wide range of potential applications and demonstrates the universal scope of the used process technology.


Archive | 2010

COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE, AND METHOD FOR ITS PRODUCTION

Frank Reichenbach; Thomas Buck; Jochen Zoellin; Franz Laermer; Ulrike Scholz; Kathrin Teeffelen; Christina Leinenbach


Archive | 2009

Verfahren zur Herstellung von vereinzelten, auf einem Siliziumsubstrat angeordneten mikromechanischen Bauteilen und hieraus hergestellte Bauteile

Franz Laermer; Christina Leinenbach; Kathrin Teeffelen


Archive | 2009

Method for manufacturing separated micromechanical components situated on a silicon substrate and components manufactured therefrom

Franz Laermer; Kathrin Teeffelen; Christina Leinenbach


Archive | 2012

Microporous body preferably from or containing silicon, useful to treat e.g. skin, preferably wrinkle and apply active agents in age spots or hyperpigmentation of skin, where body exhibits etched porous and pores to store active agent

Michael Stumber; Kathrin Teeffelen; Margaret Horton; Nils Hoffmann


Archive | 2010

Component having a micro-mechanic microphone structure and method for producing same

Frank Reichenbach; Thomas Buck; Jochen Zoellin; Franz Laermer; Ulrike Scholz; Kathrin Teeffelen; Christina Leinenbach


Archive | 2009

Protection system and method for separating MEMS structures

Kathrin Teeffelen; Ando Feyh; Christina Leinenbach


Archive | 2011

Pump, particularly micro-pump for use in pump arrangement, comprises pumping chamber, which is fluidically connected with inlet valve and outlet valve

Manuela Schmidt; Tjalf Pirk; Gilbert Moersch; Jochen Rupp; Kathrin Teeffelen; Peter Rothacher; Christian Dorrer


Archive | 2011

Micro-membrane pump for micro membrane pump system, comprises elastic element, membrane and pump chamber, where membrane limits pump chamber on one side, and membrane is actuated on outer side of micro membrane pump

Gilbert Moersch; Bassem Baffoun; Franz Laermer; Kathrin Teeffelen; Marian Keck; Christian Dorrer


Archive | 2010

Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung

Frank Reichenbach; Thomas Buck; Jochen Zoellin; Franz Laermer; Ulrike Scholz; Kathrin Teeffelen; Christina Leinenbach

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