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Jonghoon Baek

Applied Materials

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Publication

Featured researches published by Jonghoon Baek.

Archive | 2015

Dry-etch selectivity

He Ren; Jang-Gyoo Yang; Jonghoon Baek; Anchuan Wang; Soonam Park; Saurabh Garg; Nitin K. Ingle

Archive | 2013

Semiconductor processing with dc assisted rf power for improved control

Jang-Gyoo Yang; Soonam Park; Jonghoon Baek; Saurabh Garg; Shankar Venkataraman

Archive | 2010

Mixing frequency at multiple feeding points

Jonghoon Baek

Archive | 2009

Rf return path for large plasma processing chamber

Carl A. Sorensen; John M. White; Jozef Kudela; Jonghoon Baek; Jriyan Jerry Chen; Steve McPherson; Soo Young Choi; Robin L. Tiner

Archive | 2014

Particle generation suppressor by DC bias modulation

Jonghoon Baek; Soonam Park; Dmitry Lubomirsky

Archive | 2011

Tightly fitted ceramic insulator on large area electrode

Jozef Kudela; Jonghoon Baek; John M. White; Robin L. Tiner; Suhail Anwar; Gaku Furuta

Archive | 2010

Inductively-coupled plasma (icp) resonant source element

John M. White; Jonghoon Baek; Tsutomu Tanaka

Archive | 2010

Off-center ground return for rf-powered showerhead

Jonghoon Baek; Beom Soo Park; Sam H. Kim

Archive | 2012

PLASMA MONITORING AND MINIMIZING STRAY CAPACITANCE

Jonghoon Baek; Sam H. Kim; Beom Soo Park; John M. White; Shinichi Kunita; Hsiao-Lin Yang

Archive | 2011

Anti-arc zero field plate

Jonghoon Baek; Edwin C. Suarez; Tsutomu Tanaka; Edward P. Hammond; Jeonghoon Oh

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Collaboration

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Beom Soo Park

Applied Materials

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John M. White

Applied Materials

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Sam H. Kim

Applied Materials

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Soonam Park

Applied Materials

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Jang-Gyoo Yang

Applied Materials

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Saurabh Garg

Applied Materials

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Tsutomu Tanaka

Applied Materials

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Edward P. Hammond

Applied Materials

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Edwin C. Suarez

Applied Materials

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Jeonghoon Oh

Applied Materials

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