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Sam H. Kim

Applied Materials

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Publication

Featured researches published by Sam H. Kim.

Archive | 2008

Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate

William A. Bagley; Paohuei Lee; Kyung-tae Kim; Sam-Kyung Kim; Toshio Kiyotake; Sam H. Kim; Takayuki Matsumoto; Jonathan Erik Larson; Makoto Inagawa; James Hoffman; Billy C. Leung

Archive | 2002

Apparatus and method for uniform substrate heating and contaminate collection

Sam H. Kim; Akihiro Hosokawa; Dong Choon Suh

Archive | 2003

Slit valve method and apparatus

Wendell T. Blonigan; Emanuel Beer; Dongchoon Suh; Jaime Munoz; Sam H. Kim

Archive | 2007

Valve door with ball coupling

Sam H. Kim; Jae-Chull Lee; William N. Sterling; Paul Brown

Archive | 2010

Off-center ground return for rf-powered showerhead

Jonghoon Baek; Beom Soo Park; Sam H. Kim

Archive | 2012

PLASMA MONITORING AND MINIMIZING STRAY CAPACITANCE

Jonghoon Baek; Sam H. Kim; Beom Soo Park; John M. White; Shinichi Kunita; Hsiao-Lin Yang

Archive | 2010

Substrate support with gas introduction openings

Sam H. Kim; John M. White; Soo Young Choi; Carl A. Sorensen; Robin L. Tiner; Beom Soo Park

Archive | 2008

Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber

Beom Soo Park; Young Jin Choi; Robin L. Tiner; Sam H. Kim; Soo Young Choi; John M. White; Dong-Kil Yim

Archive | 2008

Clamp mechanism for a backing plate disposed in a pecvd chamber

Sam H. Kim; Beom Soo Park; William N. Sterling

Archive | 2011

BALANCING RF BRIDGE ASSEMBLY

Jonghoon Baek; Sam H. Kim; Beom Soo Park

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Beom Soo Park

Applied Materials

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Jonghoon Baek

Applied Materials

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William N. Sterling

Applied Materials

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John M. White

Applied Materials

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Soo Young Choi

Applied Materials

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Billy C. Leung

Applied Materials

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Jae-Chull Lee

Applied Materials

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James Hoffman

Applied Materials

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Jonathan Erik Larson

Applied Materials

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Kyung-tae Kim

Applied Materials

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