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Jose I. Arno

Entegris

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Publication

Featured researches published by Jose I. Arno.

Archive | 2007

Solid precursor-based delivery of fluid utilizing controlled solids morphology

John M. Cleary; Jose I. Arno; Bryan C. Hendrix; Donn Naito; Scott Battle; John Gregg; Michael J. Wodjenski; Chongying Xu

Archive | 2004

Apparatus and method for point-of-use treatment of effluent gas streams

Jose I. Arno; Mark Holst; Sam Yee; Joseph D. Sweeney; Jeff Lorelli; Jason Deseve

Archive | 2007

Cleaning of semiconductor processing systems

Frank Dimeo; James Dietz; W. Karl Olander; Robert Kaim; Steven E. Bishop; Jeffrey W. Neuner; Jose I. Arno; Paul J. Marganski; Joseph D. Sweeney; David Eldridge; Sharad Yedave; Oleg Byl; Gregory T. Stauf

Archive | 2009

Method of forming ultra-shallow junctions for semiconductor devices

Robert Kaim; Jose I. Arno; James Dietz

Archive | 2006

Apparatus and process for integrated gas blending

Jeffrey J. Homan; Jose I. Arno; Joseph D. Sweeney

Archive | 2003

Low pressure drop canister for fixed bed scrubber applications and method of using same

Paul J. Marganski; Theodore Shreve; Joseph D. Sweeney; Karl W. Olander; Jose I. Arno; Mark Holst

Archive | 2003

Rectangular parallelepiped fluid storage and dispensing vessel

Dennis Brestovansky; Michael J. Wodjenski; Jose I. Arno; J. Donald Carruthers; Phillip A. Moroco

Archive | 2003

Fluid storage and dispensing vessels having colorimetrically veriflable leak-tightness, and method of making same

Paul J. Marganski; Jose I. Arno; Edward Sturm; Kristy L. Zaleta

Archive | 2003

Abatement of effluents from chemical vapor deposition processes using organometallic source reagents

Mark Holst; Ray Dubois; Jose I. Arno; Rebecca Faller; Glenn M. Tom

Archive | 2010

APPARATUS AND METHOD FOR HYDROGEN GENERATION FROM GASEOUS HYDRIDE

J. Donald Carruthers; Jose I. Arno

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Joseph D. Sweeney

Entegris

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Michael J. Wodjenski

Entegris

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J. Donald Carruthers

Entegris

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Paul J. Marganski

Entegris

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Dennis Brestovansky

Entegris

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Karl W. Olander

Entegris

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Peng Zou

Entegris

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Robert Kaim

Infineon Technologies

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Joseph Despres

Entegris

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Mark Holst

Hewlett-Packard

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