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Dive into the research topics where Mark Holst is active.

Publication


Featured researches published by Mark Holst.


Archive | 1997

Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system

Joseph D. Sweeney; Prakash V. Arya; Mark Holst; Scott Lane


Archive | 2004

Apparatus and method for point-of-use treatment of effluent gas streams

Jose I. Arno; Mark Holst; Sam Yee; Joseph D. Sweeney; Jeff Lorelli; Jason Deseve


Archive | 1999

Integrated ion implant scrubber system

Michael W. Hayes; Mark Holst; Jose Arno


Archive | 2000

Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions

Mark Holst; Rebecca Faller; Glenn M. Tom; Jose Arno; Ray Dubois


Archive | 1998

Method for point-of-use treatment of effluent gas streams

Jose Arno; Mark Holst; Sam Yee; Joseph D. Sweeney; Jeff Lorelli; Jason Deseve


Archive | 2003

Low pressure drop canister for fixed bed scrubber applications and method of using same

Paul J. Marganski; Theodore Shreve; Joseph D. Sweeney; Karl W. Olander; Jose I. Arno; Mark Holst


Archive | 2003

Abatement of effluents from chemical vapor deposition processes using organometallic source reagents

Mark Holst; Ray Dubois; Jose I. Arno; Rebecca Faller; Glenn M. Tom


Archive | 2000

In-situ air oxidation treatment of MOCVD process effluent

Rebecca Faller; Mark Holst


Archive | 1997

Effluent gas stream treatment system for oxidation treatment of semiconductor manufacturing effluent gases

Mark Holst; Kent Carpenter; Scott Lane; Prakash V. Arya; Patrick Balliew; Joseph D. Sweeney


Archive | 1997

Alternating wash/dry water scrubber entry

Mark Holst; Patrick Balliew

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