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Joydeep Guha

Lam Research

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Publication

Featured researches published by Joydeep Guha.

Archive | 2014

Methods and apparatuses for void-free tungsten fill in three-dimensional semiconductor features

Anand Chandrashekar; Joydeep Guha; Raashina Humayun; Hua Xiang

Archive | 2015

Dual chamber plasma etcher with ion accelerator

Joydeep Guha

Archive | 2013

LAYER-LAYER ETCH OF NON VOLATILE MATERIALS USING PLASMA

Joydeep Guha

Archive | 2015

High aspect ratio etch with combination mask

Joydeep Guha; Sirish Reddy; Kaushik Chattopadhyay; Thomas W. Mountsier; Aaron Eppler; Thorsten Lill; Vahid Vahedi; Harmeet Singh

Archive | 2014

PLASMA BAFFLE RING FOR A PLASMA PROCESSING APPARATUS AND METHOD OF USE

Joydeep Guha

Archive | 2012

LAYER-LAYER ETCH OF NON VOLATILE MATERIALS

Joydeep Guha; Jeffrey Marks; Butsurin Jinnai

Archive | 2013

WAFERLESS AUTO CONDITIONING

Joydeep Guha; Sanket Sant; Butsurin Jinnai

Archive | 2018

METHOD AND PROCESS OF IMPLEMENTING MACHINE LEARNING IN COMPLEX MULTIVARIATE WAFER PROCESSING EQUIPMENT

Joydeep Guha; John Daugherty; Vahid Vahedi; Richard A. Gottscho

Archive | 2017

Systems and Methods for Separately Applying Charged Plasma Constituents and Ultraviolet Light in a Mixed Mode Processing Operation

Joydeep Guha; Aaron Eppler

Archive | 2017

SYSTEMS AND METHODS FOR SELECTIVELY ETCHING TUNGSTEN IN A DOWNSTREAM REACTOR

Dengliang Yang; Helen Zhu; George Matamis; Brad Jacobs; Joon Hong Park; Joydeep Guha

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Collaboration

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Aaron Eppler

Lam Research

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Butsurin Jinnai

Lam Research

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Vahid Vahedi

Lam Research

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Amit Pharkya

Lam Research

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Anand Chandrashekar

Lam Research

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Andrew Stratton Bravo

Lam Research

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Brad Jacobs

Lam Research

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Camelia Rusu

Lam Research

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Dengliang Yang

Lam Research

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George Matamis

Lam Research

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