Camelia Rusu | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Camelia Rusu is active.

Explore More

Publication

Featured researches published by Camelia Rusu.

Archive | 2004

High aspect ratio etch using modulation of RF powers of various frequencies

Camelia Rusu; Rajinder Dhindsa; Eric Hudson; Mukund Srinivasan; Lumin Li; Felix Kozakevich

Archive | 2004

Multiple frequency plasma etch reactor

Raj Dhindsa; S.M. Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks

Archive | 2008

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL

Robert P. Chebi; Frank Y. Lin; Jaroslaw W. Winniczek; Wan-Lin Chen; Erin Mcdonnell; Lily Zheng; Stephan Lassig; Jeff Bogart; Camelia Rusu

Archive | 2005

Etch profile control

Camelia Rusu; Zhisong Huang; Mukund Srinivasan; Eric Hudson; Aaron Eppler

Archive | 2008

Hardmask open and etch profile control with hardmask open

Jong Pil Lee; Seiji Kawaguchi; Camelia Rusu; Zhisong Huang; Mukund Srinivasan; Eric Hudson; Aaron Eppler

Archive | 2010

Inorganic rapid alternating process for silicon etch

Tsuyoshi Aso; Camelia Rusu

Archive | 2003

Multiple frequency plasma processor method and apparatus

Raj Dhindsa; S. M. Reza Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks

Archive | 2003