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Dive into the research topics where Camelia Rusu is active.

Publication


Featured researches published by Camelia Rusu.


Archive | 2004

High aspect ratio etch using modulation of RF powers of various frequencies

Camelia Rusu; Rajinder Dhindsa; Eric Hudson; Mukund Srinivasan; Lumin Li; Felix Kozakevich


Archive | 2004

Multiple frequency plasma etch reactor

Raj Dhindsa; S.M. Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks


Archive | 2008

FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL

Robert P. Chebi; Frank Y. Lin; Jaroslaw W. Winniczek; Wan-Lin Chen; Erin Mcdonnell; Lily Zheng; Stephan Lassig; Jeff Bogart; Camelia Rusu


Archive | 2005

Etch profile control

Camelia Rusu; Zhisong Huang; Mukund Srinivasan; Eric Hudson; Aaron Eppler


Archive | 2008

Hardmask open and etch profile control with hardmask open

Jong Pil Lee; Seiji Kawaguchi; Camelia Rusu; Zhisong Huang; Mukund Srinivasan; Eric Hudson; Aaron Eppler


Archive | 2010

Inorganic rapid alternating process for silicon etch

Tsuyoshi Aso; Camelia Rusu


Archive | 2003

Multiple frequency plasma processor method and apparatus

Raj Dhindsa; S. M. Reza Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks


Archive | 2003

Methods of reducing photoresist distortion while etching in a plasma processing system

Camelia Rusu; Mukund Srinivasan


Archive | 2012

Method for achieving smooth side walls after bosch etch process

Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller; Qing Xu; Seongjun Heo; Jin Hwan Ham; Sang Joon Yoon; Camelia Rusu


Archive | 2011

Method for providing high etch rate

Qing Xu; Camelia Rusu; Jaroslaw W. Winniczek; Frank Y. Lin; Alan J. Miller

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