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Jun Chung-Sam

Samsung

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Publication

Featured researches published by Jun Chung-Sam.

Archive | 2006

INSPECTION METHOD OF PATTERN FORMED ON SUBSTRATE, AND INSPECTION APPARATUS FOR IMPLEMENTING SAME

Kin Keigen; Jun Chung-Sam; Chung Ki-Suk; Chon Sang-Moon; Kim Seong-Jin; Lee Byung Seok; Yang Yu-Sin

Archive | 2007

METHOD OF INSPECTING A DEFECT ON A SUBSTRATE

Park Sung-Hong; Yoon Young-Jee; Lim Jung-Taek; Jun Chung-Sam

Archive | 2001

METHOD FOR MEASURING THIN FILM THICKNESS AND DEVICE APPLIED WITH SAME

Jun Chung-Sam; Chon Sang-Moon; Sai Soho; Cho Keidai; Hyun Pil-Sik

Archive | 2002

METHOD AND DEVICE FOR INSPECTING POLISHING PAD

Jun Chung-Sam; Kim Kye-Weon; Yang Yu-Sin; Kim Hyo-Hoo

Archive | 2001

Verfahren und Vorrichtung zur Detektion von Mikrokratzern in einem Wafer

Jun Chung-Sam; Chon Sang-Mun; Choi Sang-Bong; Cho Hyung-Suk; Hyun Pil-Sik; Lim Kyu-Hong; Lee Byung-Am

Archive | 2002

Verfahren zur Farbvariationskorrektur und Defekterkennung für Wafer

Jun Chung-Sam; Chon Sang-Mun; Kim Hyoung-Jin; Lee Dong-Chun; Choi Sang-Bong; Ryu Sung-Gon

Archive | 2001

METHOD FOR INSPECTING MICRO-SCRATCH AND DEVICE THEREFOR USING THE SAME

Jun Chung-Sam; Chon Sang-Moon; Sai Soho; Cho Keidai; Hyun Pil-Sik; Lim Kyu-Hong; Lee Byung-Am

Archive | 1998

Verfahren zur Überprüfung zumindest eines Teils eines Halbleiterwafers mit einem Rasterelektronenmikroskop

Jun Chung-Sam; Kim Jeong-Kon; Chon Sang-Moon; Choi Sang-Bong

Archive | 2018

METHOD OF INSPECTING SEMICONDUCTOR WAFER, AN INSPECTION SYSTEM FOR PERFORMING THE SAME, AND A METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

Song Joonseo; Ryu Sung Yoon; Yap Wahseng; Jee Yunjung; Yang Yu-Sin; Jun Chung-Sam; Jeoung Yoo Jin; Ahn Jaehyung; Lee Janghee

Archive | 2017

APPARATUS AND METHOD FOR MEASURING THICKNESS

Ryu Sung Yoon; Sohn Younghoon; Yang Yu-Sin; Jun Chung-Sam; Jee Yunjung

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Yang Yu-Sin

Samsung

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Choi Sang-Bong

Samsung

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Chon Sang-Mun

Samsung

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Lee Sang-Kil

Samsung

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Hyun Pil-Sik

Samsung

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Kim Kye-Weon

Samsung

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Ko Woo-Seok

Samsung

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Lee Dong-Chun

Samsung

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Ryu Sung Yoon

Samsung

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Yoon Young-Jee

Samsung

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