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Jun Emoto

TDK

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Publication

Featured researches published by Jun Emoto.

Archive | 2010

Lid opening/closing system for closed container and substrate processing method using same

Tsutomu Okabe; Jun Emoto

Archive | 2008

METHOD OF PROCESSING AN OBJECT IN A CONTAINER AND LID OPENING/CLOSING SYSTEM USED IN THE METHOD

Tsutomu Okabe; Jun Emoto; Tomoshi Abe

Archive | 2012

PURGE DEVICE AND LOAD PORT APPARATUS INCLUDING THE SAME

Jun Emoto; Tadamasa Iwamoto; Toshihiko Miyajima

Archive | 2004

Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit

Toshihiko Miyajima; Tsutomu Okabe; Jun Emoto

Archive | 2003

Wafer processing apparatus having wafer mapping function

Jun Emoto; Takeshi Kagaya; Kazuo Yamazaki

Archive | 2003

Wafer processing apparatus having wafer mapping function, and method for detecting wafers

Jun Emoto; Takeshi Kagaya; Kazuo Yamazaki

Archive | 2017

GAS PURGE APPARATUS, LOAD PORT APPARATUS, INSTALLATION STAND FOR PURGING CONTAINER, AND GAS PURGE METHOD

Jun Emoto; Tadamasa Iwamoto

Archive | 2014

Gas purge unit, load port apparatus, and installation stand for purging container

Mutsuo Sasaki; Jun Emoto; Hiroshi Igarashi

Archive | 2009

Closed container and control system for closed container

Jun Emoto; Tomoshi Abe

Archive | 2007

POD CRAMPING UNIT, LOAD PORT EQUIPPED WITH POD CRAMPING UNIT AND MINI-ENVIRONMENT SYSTEM INCLUDING POD AND LOAD PORT

Toshihiko Miyajima; Jun Emoto; Hidetoshi Horibe

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Collaboration

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Toshihiko Miyajima

TDK

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Tadamasa Iwamoto

TDK

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Hidetoshi Horibe

TDK

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Tomoshi Abe

TDK

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Tsutomu Okabe

TDK

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Kazuo Yamazaki

TDK

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Takeshi Kagaya

TDK

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Hidenori Tsutsui

TDK

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Hiroshi Igarashi

TDK

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Mutsuo Sasaki

TDK

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