Jun Emoto

Lid opening/closing system for closed container and substrate processing method using same

METHOD OF PROCESSING AN OBJECT IN A CONTAINER AND LID OPENING/CLOSING SYSTEM USED IN THE METHOD

PURGE DEVICE AND LOAD PORT APPARATUS INCLUDING THE SAME

Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit

Wafer processing apparatus having wafer mapping function

Wafer processing apparatus having wafer mapping function, and method for detecting wafers

GAS PURGE APPARATUS, LOAD PORT APPARATUS, INSTALLATION STAND FOR PURGING CONTAINER, AND GAS PURGE METHOD

Gas purge unit, load port apparatus, and installation stand for purging container

Closed container and control system for closed container

POD CRAMPING UNIT, LOAD PORT EQUIPPED WITH POD CRAMPING UNIT AND MINI-ENVIRONMENT SYSTEM INCLUDING POD AND LOAD PORT