Tsutomu Okabe | Researchain

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Publication

Featured researches published by Tsutomu Okabe.

Archive | 2006

Lid opening/closing system of an airtight container

Tsutomu Okabe

Archive | 2010

Lid opening/closing system for closed container and substrate processing method using same

Tsutomu Okabe; Jun Emoto

Archive | 2003

Clean box, clean transfer method and system

Toshihiko Miyajima; Tsutomu Okabe

Archive | 2008

METHOD OF PROCESSING AN OBJECT IN A CONTAINER AND LID OPENING/CLOSING SYSTEM USED IN THE METHOD

Tsutomu Okabe; Jun Emoto; Tomoshi Abe

Archive | 2007

Method of processing object to be housed and cover opening/closing system used therefor

Tomoshi Abe; Atsushi Emoto; Tsutomu Okabe; 勉岡部; 淳江本; 知史阿部

Archive | 2009

Closed container and lid opening/closing system therefor

Hiroshi Igarashi; Toshihiko Miyajima; Tsutomu Okabe

Archive | 2006

PURGE SYSTEM FOR A PRODUCT CONTAINER AND TABLE FOR USE IN THE PURGE SYSTEM

Tsutomu Okabe; Hitoshi Suzuki

Archive | 2011

SUBSTRATE STORAGE POD WITH REPLACEMENT FUNCTION OF CLEAN GAS

Tsutomu Okabe; Toshihiko Miyajima

Archive | 2009

CONTAINED OBJECT TRANSFER SYSTEM

Tsutomu Okabe; Toshihiko Miyajima

Archive | 2003

Wafer processing apparatus having dust proof function

Tsutomu Okabe; Hiroshi Igarashi

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Collaboration

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Toshihiko Miyajima

TDK

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Hiroshi Igarashi

TDK

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Hitoshi Suzuki

TDK

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Jun Emoto

TDK

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Tomoshi Abe

TDK

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Hideaki Watanabe

TDK

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Koichiro Oikawa

TDK

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Masato Takahashi

Nikon

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Mutsuo Sasaki

TDK

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Yoshiaki Fujimori

East Tennessee State University

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