Jun-Hyub Park

New Estimation Method of Fatigue Properties of Aluminum Alloys

A new method on estimating fatigue properties from simple tensile data was proposed for aluminum alloys. The method is based on experimental strain-life curves. An optimization technique was used to get the best fatigue properties. The four-point correlation method, the universal slopes method, Mitchells method, the modified universal slopes method, the uniform material law by Baumel and Seeger the modified four-point correlation method by Ong and a new method proposed in this work were evaluated in a quantitative manner Mitchells method, the uniform materials law and the new method give good life predictions for aluminum alloys. In particular, the new method provided the best results.

Specimen alignment in an axial tensile test of thin films using direct imaging and its influence on the mechanical properties of BeCu

This paper proposes a new system for verification of the alignment of loading fixtures and test specimens during tensile testing of thin film with a micrometer size through direct imaging. The novel and reliable image recognition system to evaluate the misalignment between the load train and the specimen axes during tensile test of thin film was developed using digital image processing technology with CCD. The decision of whether alignment of the tensile specimen is acceptable or not is based on a probabilistic analysis through the edge feature extraction of digital imaging. In order to verify the performance of the proposed system and investigate the effect of the misalignment of the specimen on tensile properties, the tensile tests were performed as displacement control in air and at room temperature for metal thin film, the beryllium copper (BeCu) alloys. In the case of the metal thin films, bending stresses caused by misalignment are insignificant because the films are easily bent during tensile tests to eliminate the bending stresses. And it was observed that little effects and scatters on tensile properties occur by stress gradient caused by twisting at in-plane misalignment, and the effects and scatters on tensile properties are insignificant at out-of-plane misalignment, in the case of the BeCu thin film.

Prediction of Residual Stress Distribution in Multi-Stacked Thin Film by Curvature Measurement and Iterative FEA

In this study, residual stress distribution in multi-stacked film by MEMS (Micro-Electro Mechanical System) process is predicted using Finite Element method FEMi. We develop a finite element program for residual stress analysis (RESA) in multi-stacked film. The RESA predicts the distribution of residual stress field in multi-stacked film. Curvatures of multistacked film and single layers which consist of the multi-stacked film are used as the input to the RESA. To measure those curvatures is easier than to measure a distribution of residual stress. To verify the RESA. mean stresses and stress gradients of single and multilayers are measured. The mean stresses are calculated from curvatures of deposited wafer by using Stoney’s equation. The stress gradients are calculated from the vertical deflection at the end of cantilever beam. To measure the mean stress of each layer in multi-stacked film, we measure the curvature of wafer with the left film after etching layer by layer in multi-stacked film.

Fatigue test of MEMS device : a monolithic inkjet print

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially, the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.

New Structures and Techniques for Easy Axial Loading Test of Static and Fatigue Properties of MEMS Materials

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems (MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of materials used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed an axial testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, new techniques and procedures for measuring strength are described.

New strain measurement method at axial tensile test of thin films through direct imaging

This paper proposes a new method for measuring strain during a tensile test of the specimen with micrometre size through direct imaging. A specimen was newly designed for adoption of direct imaging which was the main contribution of the proposed system. The structure of the specimen has eight indicators that make it possible to adopt direct imaging and it is fabricated using the same process of microelectromechanical system (MEMS) devices to guarantee the feasibility of the tensile test. We implemented a system for non-contact in situ measurement of strain with the specimen, the image-based displacement measurement system. Extension of the gauge length in the specimen could be found robustly by computing the positions of the eight rectangular-shape indicators on the image. Also, for an easy setup procedure, the region of interest was found automatically through the analysis of the edge projection profile along the horizontal direction. To gain confidence in the reliability of the system, the tensile test for the Al–3%Ti thin film was performed, which is widely used as a material in MEMS devices. Tensile tests were performed and displacements were measured using the proposed method and also the capacitance type displacement sensor for comparison. It is demonstrated that the new strain measurement system can be effectively used in the tensile test of the specimen at microscale with easy setup and better accuracy.

An expert system for fatigue life prediction under variable loading

To predict fatigue crack initiation life under variable loading easily, an expert system is developed, which is easy for ordinary engineering designers to use and can be also effectively utilized by fatigue researchers of any level, for discussing and evaluating various estimation methods associated with fatigue life prediction. The expert system is developed using a commercial expert system shell, Acquire. A concept of generalized modification of S-N curve including most of principal damage rules proposed so far is introduced to consider the load interaction effect under variable loading and used as the default damage rule in the expert system. The performance of the expert system is tested using the fatigue life data of the SAE Test Program on two steels. The expert system shows very good performance, providing moderate conservative predictions.

Light-weight Design of Automotive AA6061 Rear Sub-frame Based on CAE Simulation

It is well known that the targeted fuel efficiency could only be achieved by more than 40% reduction of the vehicle weight through improved design and extensive utilization of lightweight materials. In order to obtain the goal of the weight reduction of automobiles, the researches about lighter and stronger rear sub-frame have been studied without sacrificing the safety of rear sub-frame. In this study, the weight reduction design process of rear sub-frame could be proposed based on the variation of von-Mises stress contour by substituting an AA6061 (aluminum 6061 alloy) having tensile strength of 310 MPa grade instead of SAPH440 steels. In addition, the stress ratio variations (stress over fatigue limit) of the rear sub-frame were examined and compared carefully. It could be reached that this approach method could be well established and be contributed for light-weight design guide and the optimum design conditions of the automotive rear sub-frame development.

Mechanical Properties of Al-3%Ti Thin Film for Reliability Analysis of RF MEMS Switch

This paper presents a novel experimental method to investigate the strength of material, Al-3%Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3%Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1µm and 480µm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3%Ti was 144MPa.

Novel Test Procedure of Tensile Test for MEMS Materials

This paper describes a novel test procedure, new structure of specimen easy to manipulate, align and grip a thin-film and test machine for a tensile and fatigue test. For the proposed specimen, the surroundings of the specimen including the side support strips except for six bridges are etched during the fabrication of the specimen, which in turn makes it possible to cut off easily the specimen from the wafer by minimizing a damage to the test film and also possible to produce the specimen in mass production. For the present specimen, a small hole is made at the grip end and using a small pin for setting the specimen onto the tester, the setting process and alignment of specimen is much easier, compared to the specimen proposed by Sharpe et al. To gain confidence in reliability of testing results, pre-test using the Al-3%Ti is performed, which is widely used in the RF switch and other MEMS devices. Tensile tests are performed, from which tensile strengths of the Al-3%Ti are measured as 343±16.22MPa at 200μm width and 1.1μm thickness.