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Jun Sonobe

Air Liquide

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Publication

Featured researches published by Jun Sonobe.

Archive | 2001

Method and apparatus for cleaning and method and apparatus for etching

Jun Sonobe; Yoshikuni Koruda; Regis Zils; Minoru Ino; Takako Kimura; Yukinobu Nishikawa

Archive | 2009

Low pressure acetylene storage

Shih-Wen Huang; Jun Sonobe

Archive | 2004

Method of cleaning a film-forming apparatus and film-forming apparatus

Yuusuke Sato; Naoki Tamaoki; Satoko Seta; Regis Zils; Jun Sonobe; Takako Kimura; Kayo Momoda

Archive | 2007

Method of cleaning film forming apparatus and film forming apparatus

Takamitsu Shigemoto; Jun Sonobe

Archive | 2004

Apparatus for the generation of fluorine gas

Jun Sonobe; Minoru Ino; Muneuyki Fukuoka; Takako Kimura

Archive | 2002

Apparatus for the generation and supply of fluorine gas

Colin Kennedy; Takako Kimura; Minoru Ino; Jun Sonobe

Archive | 2008

METHOD FOR LOW TEMPERATURE THERMAL CLEANING

Jun Sonobe; Yudai Tadaki; Takamitsu Shigemoto; Jean-Marc Girard

Archive | 2011

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF CLEANING PROCESSING VESSEL

Kenji Kameda; Jun Sonobe; Yudai Tadaki

Meeting Abstracts | 2007

Thermal Cleaning of Silicon Nitride with Fluorine and Additive Mixture

Takamitsu Shigemoto; Jun Sonobe

Archive | 2014

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF CLEANING PROCESSING VESSEL

Kenji Kameda; Jun Sonobe; Yudai Tadaki

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Collaboration

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Takamitsu Shigemoto

Air Liquide

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Minoru Ino

Air Liquide

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Yudai Tadaki

Air Liquide

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Takako Kimura

Air Liquide

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Jean-Marc Girard

Air Liquide

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Kenji Kameda

Air Liquide

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Regis Zils

Air Liquide

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Takako Kimura

Air Liquide

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Naoki Tamaoki

Air Liquide

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Shih-Wen Huang

Air Liquide

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