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Junichi Koike

Tokyo Electron

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Publication

Featured researches published by Junichi Koike.

Archive | 2009

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, ELECTRONIC INSTRUMENT, SEMICONDUCTOR MANUFACTURING APPARATUS, AND STORAGE MEDIUM

Kenji Matsumoto; Hitoshi Itoh; Hiroshi Sato; Junichi Koike; Koji Neishi

Archive | 2007

FILM FORMING APPARATUS, FILM FORMING METHOD, COMPUTER PROGRAM AND STORAGE MEDIUM

Kenji Matsumoto; Junichi Koike; Koji Neishi

Archive | 2009

Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium

Kenji Matsumoto; Shigetoshi Hosaka; Junichi Koike; Koji Neishi

Archive | 2012

COPPER INTERCONNECTION, METHOD FOR FORMING COPPER INTERCONNECTION STRUCTURE, AND SEMICONDUCTOR DEVICE

Junichi Koike; Akihiro Shibatomi

Archive | 2011

Manganese oxide film forming method, semiconductor device manufacturing method and semiconductor device

Koji Neishi; Junichi Koike; Kenji Matsumoto

Archive | 2010

Method for forming manganese oxide film, method for manufacturing semiconductor device, and semiconductor device

Koji Neishi; 浩司 根石; Junichi Koike; 小池 淳一; Kenji Matsumoto; 松本 賢治

Archive | 2011

Silicon carbide electrode, silicon carbide semiconductor element, silicon carbide semiconductor device, and method for forming electrode for silicon carbide

Junichi Koike; 小池 淳一; Kunhwa Jung; 建華 丁; Yuji Sutou; 須藤 祐司; Akihiro Shibatomi; 昭洋 柴富

Archive | 2010

METHOD FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING MANGANESE OXIDE FILM, AND COMPUTER-READABLE STORAGE MEDIUM

Koji Neishi; Junichi Koike; Kenji Matsumoto

Archive | 2009

Semiconductor device manufacturing method, semiconductor device, electronic device, semiconductor manufacturing apparatus and storage medium

Kenji Matsumoto; Hitoshi Itoh; Hiroshi Sato; Junichi Koike; Koji Neishi

Archive | 2013

Solar cell, method of forming oxide layer in the solar cell and method of forming laminated oxide layer

Junichi Koike; 淳一 小池; Tri Hai Hoan; チ ハイ ホアン; Daisuke Ando; 大輔 安藤

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Collaboration

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Yuji Sutou

Tohoku University

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Kenji Matsumoto

National Institute for Materials Science

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Koji Neishi

Tohoku University

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Daisuke Ando

Tohoku University

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Yuta Saito

National Institute of Advanced Industrial Science and Technology

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Hiroshi Sato

Tokyo Electron

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Hitoshi Itoh

Tokyo Electron

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Akihiro Shibatomi

Tohoku University

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Satoshi Shindo

Tohoku University

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Shigetoshi Hosaka

Tokyo Electron

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