Juntaro Arima

The development of security system and visual service support software for on-line diagnostics

Hitachis CD-SEM achieves the highest tool availability in the industry. However, efforts to further our performance are continuously underway. The proposed on-line diagnostics system can allow senior technical staff to monitor and investigate tool status by connecting the equipment supplier and the device manufacturer sites through the Internet. The advanced security system ensures confidentiality by firewalls, digital certification, and advanced encryption algorithms to protect device manufacturer data from unauthorized access. Service support software, called DDS (defective part diagnosis support system), will analyze the status of mechanical, evacuation, and optical systems. Its advanced overlay function on a timing chart identifies failed components in the tool and allows on-site or remote personnel to predict potential failures prior to their occurrence. Examples of application shows that the proposed system is expected to reduce repair time, improve availability and lower cost of ownership.