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Kamiyama Kinya

Mitsubishi

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Publication

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Archive | 1996

FORMING METHOD OF CHARGED BEAM DRAWING DATA AND ITS FORMING EQUIPMENT

Moriizumi Koichi; Kamiyama Kinya; Sugano Makoto; Taoka Hironobu; Nakao Hiroomi; Yamazaki Kazuhiro

Archive | 1991

Graphic data processor

Moriizumi Koichi; Fujino Takeshi; Kamiyama Kinya; Morimoto Hiroaki; Watakabe Yaichiro

Archive | 1998

CHARGED BEAM LITHOGRAPH DATA GENERATING DEVICE

Kamiyama Kinya; Moriizumi Koichi; Taoka Hironobu

Archive | 1998

METHOD AND SYSTEM FOR GENERATING CHARGED BEAM LITHOGRAPHIC DATA AND MECHANICALLY READABLE MEDIUM STORING PROGRAM FOR EXECUTING LITHOGRAPHIC DATA GENERATION THROUGH COMPUTER

Taoka Hironobu; Kamiyama Kinya; Moriizumi Koichi

Archive | 1999

APPARATUS FOR PREPARING CHARGED PARTICLE BEAM LITHOGRAPHIC DATA

Kamiyama Kinya; Taoka Hironobu; Moriizumi Koichi

Archive | 1993

CHARGED BEAM LITHOGRAPHY DEVICE AND PATTERN FORMING METHOD USING CHARGED BEAM

Kamiyama Kinya; Moriizumi Koichi

Archive | 1992

Patterned resist, esp. useful for integrated circuit prodn. - by forming and exposing single resist layer, followed by repeated silylation and etching steps to prevent side corrosion

Kamiyama Kinya; Fujino Takeshi

Archive | 1995

METHOD FOR FORMING PATTERN BY ELECTRON BEAM LITHOGRAPHY

Moriizumi Koichi; Kamiyama Kinya

Archive | 2000

METHOD AND SYSTEM FOR GENERATING CHARGED BEAM LITHOGRAPHIC DATA AND MECHANICALLY READABLE MEDIUM STORING PROGRAM FOR DATA

Kamiyama Kinya; Moriizumi Koichi; Taoka Hironobu

Archive | 1999

Gerät zur Musteraufzeichnung mittels Elektronenstrahl und Mustersaufzeichnungsverfahren unter Verwendung eines solchen Geräts

Moriizumi Koichi; Kamiyama Kinya; Taoka Hironobu

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Moriizumi Koichi

Mitsubishi

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Taoka Hironobu

Mitsubishi

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Kanno Makoto

Mitsubishi

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Nakao Hiroomi

Mitsubishi

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Yamazaki Kazuhiro

Mitsubishi

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Fujino Takeshi

Mitsubishi

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Morimoto Hiroaki

Mitsubishi Electric

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