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Taoka Hironobu

Mitsubishi

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Publication

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Archive | 1996

FORMING METHOD OF CHARGED BEAM DRAWING DATA AND ITS FORMING EQUIPMENT

Moriizumi Koichi; Kamiyama Kinya; Sugano Makoto; Taoka Hironobu; Nakao Hiroomi; Yamazaki Kazuhiro

Archive | 1998

CHARGED BEAM LITHOGRAPH DATA GENERATING DEVICE

Kamiyama Kinya; Moriizumi Koichi; Taoka Hironobu

Archive | 1998

METHOD AND SYSTEM FOR GENERATING CHARGED BEAM LITHOGRAPHIC DATA AND MECHANICALLY READABLE MEDIUM STORING PROGRAM FOR EXECUTING LITHOGRAPHIC DATA GENERATION THROUGH COMPUTER

Taoka Hironobu; Kamiyama Kinya; Moriizumi Koichi

Archive | 1999

APPARATUS FOR PREPARING CHARGED PARTICLE BEAM LITHOGRAPHIC DATA

Kamiyama Kinya; Taoka Hironobu; Moriizumi Koichi

Archive | 2008

APPARATUS AND PROCESS FOR PATTERN DISTORTION DETECTION

Taoka Hironobu; Moriizumi Koichi

Archive | 2000

METHOD AND SYSTEM FOR GENERATING CHARGED BEAM LITHOGRAPHIC DATA AND MECHANICALLY READABLE MEDIUM STORING PROGRAM FOR DATA

Kamiyama Kinya; Moriizumi Koichi; Taoka Hironobu

Archive | 1999

Gerät zur Musteraufzeichnung mittels Elektronenstrahl und Mustersaufzeichnungsverfahren unter Verwendung eines solchen Geräts

Moriizumi Koichi; Kamiyama Kinya; Taoka Hironobu

Archive | 1999

Charged particle beam drawing system including charged particle beam drawing data production apparatus

Kamiyama Kinya; Moriizumi Koichi; Kanno Makoto; Taoka Hironobu

Archive | 1999

Cutting into plurality of drawing sketch field to produce high precision electric load beam sketch data method

Taoka Hironobu; Moriizumi Koichi; Kamiyama Kinya

Archive | 1996

Verfahren und Vorrichtung zur Erzeugung von Musterdaten für einen Ladungsstrahl

Moriizumi Koichi; Kamiyama Kinya; Kanno Makoto; Taoka Hironobu; Nakao Hiroomi; Yamazaki Kazuhiro

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Moriizumi Koichi

Mitsubishi

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Kamiyama Kinya

Mitsubishi

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Kanno Makoto

Mitsubishi

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Nakao Hiroomi

Mitsubishi

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Yamazaki Kazuhiro

Mitsubishi

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