Karen Hill Brown

Photo‐oxidation of silicon monoxide to silicon dioxide with pulsed far‐ultraviolet (193 nm) laser radiation

Silicon monoxide films (1000–5000 A thick) are converted to silicon dioxide when irradiated in air with pulses (∼15 n half‐width) of 193‐nm radiation (40–110 mJ/cm2) from an excimer laser. The quantum efficiency of the process has a minimum value of 0.014.

Advancing the state of the art in high-performance logic and array technology

High-speed silicon bipolar technology continues to meet the demands of integrated circuits for mainframe computers. IBIVI has developed an advanced bipolar logic and highspeed array technology for Its Enterprise System/9000TM systems. This technology, codenamed ATX-4, is composed of trench-Isolated, doubie-polyslilcon self-aligned bipolar devices, and has four fully pianarized wiring levels with interievel connecting studs. Chip fabrication has been implemented In l-fxm ground rules and Is In full-scale manufacturing. ATX-4 represents a significant advance in providing higher-speed and lower-power logic at increased levels of integration compared with that of the ATX-1 technology used In previous generations. An overview of the design and integration of ATX-4 Is discussed.

Organic photochemistry with 6.7eV photons: 1,2,5,6-tetrahydropyridines and tropidine

Abstract Irradiation of the title compounds in hydrocarbon solutions with 185nm light leads to retro-Diels-Alder reactions as the principal process. The imine fragment, CH2=C-CH3 undergoes efficient trimerization, a process which may be promoted by molecular association of the reactant.

A Business Content Explorer for intelligent traffic projects

We have built a standalone tool called the Business Content Explorer to provide traffic-domain specific content consisting of concepts, business rules, metrics and business processes readily available to IT professionals (software architects and developers) working on ITS projects. The novelties in the tool are twofold in terms of: (a) how the user can use the tool, and (b) how the content is collected and continuously updated. For tool usage, the tool supports not only browsing of the relevant as well as authoritative content but also its evolution over different projects. Specifically, the user can select specific subset that can be used in their project, enhance it, export and then re-import the extended content to reconcile it with the master content. For content creation, we follow a semi-automated method wherein public documents like Request for Proposals (RFPs), Tenders and Technical Papers are collected and then semi-automated content extraction techniques in off-the-shelf tools are used to obtain the content. Initial feedback from practioners indicates that the approach is able to provide valuable and much-needed content to them.

Organic photochemistry with 6.7 eV photons: 4-vinyl cyclohexene

Aus 4-Vinylcyclohexen (I) erhalt man bei der Photolyse Reaktionsgemische, aus denen die Ole- ?ne (II)-(IV) isoliert werden konnen.

Using business content explorer for smarter projects

We built a standalone tool, the Business Content Explorer, to provide domain-specific content, consisting of concepts, business rules, metrics and business processes that are readily available to IT professionals (software architects and developers). This tool structures content based on the Business Content Hierarchy (BCH). The novelties in the tool are: (a) how the user can use the tool, and (b) how the content is created. The user is able to use the tool to browse both relevant and authoritative content, and also view its evolution over different projects. Specifically, the user can select a specific subset that can be used in their project, enhance it, export it, and then re-import the extended content to reconcile it with the master content. For content creation, we followed a novel, semi-automated, method in which public documents such Request for Proposals (RFPs), tenders and papers are collected; then, content extraction techniques in off-the-shelf tools are used to identify content.

Process and Tool Monitoring

Process control, an important element in the success of any manufacturing operation, is especially critical for the complex processes in semiconductor manufacturing. This chapter discusses what should be done in the early phases of process development to have an optimum, manufacturable process. It then describes the process control techniques currently practiced and new methods being incorporated in tools for in situ measurement and control. It is essential that engineers develop process controls during the early development phases of each technology. Cost-effective manufacturing mandates that these controls be imbedded in the process design as the development-to-manufacturing cycle is compressed. Process control requires identification of significant process parameters, and the correlation of each of these to critical product design specifications. One must ensure that the design of the product and process are as insensitive to material variations as possible. Having designed a robust product, one must have control of the process to minimize variability within the process limits as needed for maximum productivity.