Kathleen Alice Perry | Researchain

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Archive | 1985

Chem-mech polishing method for producing coplanar metal/insulator films on a substrate

Klaus Dietrich Beyer; William L. Guthrie; Stanley R. Makarewicz; Eric Mendel; William John Patrick; Kathleen Alice Perry; William Aaron Pliskin; Jacob Riseman; Paul M. Schaible; Charles L. Standley

Archive | 1985

Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias

Melanie M. Chow; John Edward Cronin; William L. Guthrie; Carter Welling Kaanta; Barbara Jean Luther; William John Patrick; Kathleen Alice Perry; Charles L. Standley

Archive | 1992

Deposition method for high aspect ratio features using photoablation

Bodil Braren; Karen Hill Brown; Kathleen Alice Perry; R. Srinivasan; Alvin Sugerman

Archive | 1986

METHOD FOR PRODUCING COPLANAR MULTI-LEVEL METAL/INSULATOR FILMS ON A SUBSTRATE

Melanie Min-Chieh Chow; John Edward Cronin; William Leslie Guthrie; Carter Welling Kaanta; Barbara Jean Luther; William John Patrick; Kathleen Alice Perry; Charles L. Standley

Archive | 1990

Deposition method for high aspect ratio features

Bodil Braren; Karen Hill Brown; Kathleen Alice Perry; R. Srinivasan; Alvin Sugerman

Archive | 1994

Method for forming metal layer and silicon dioxide layer on same flat surface

Klaus Dietrich Beyer; William L. Guthrie; Stanley R. Makarewicz; Eric Mendel; William John Patrick; Kathleen Alice Perry; William Aaron Pliskin; Jacob Riseman; Paul M. Schaible; Charles L. Standley; ウイリアム・アロン・プリスキン; ウイリアム・ジョン・パトリック; ウイリアム・レスリー・ガスリー; エリック・メンデル; キャサリーン・アリス・ペリー; クラウス・ディートリッチ・ベイヤー; スタンレー・リチャード・マーカレウイックズ; チャールズ・ランバート・スタンドレイ; ポール・マーチン・シャイブル; ヤコブ・ライズマン

Archive | 1986

Verfahren zur herstellung koplanarer viellagen-metall-isolator-schichten auf einem substrat. A process for producing coplanar much lay-metal insulator films on a substrate.

Melanie Min-Chieh Chow; John Edward Cronin; William Leslie Guthrie; Carter Welling Kaanta; Barbara Jean Luther; William John Patrick; Kathleen Alice Perry; Charles L. Standley

Archive | 1986

Methode de polissage chimico-mecanique pour la production de depots coplanaires metal/isolant sur un substrat

Klaus Dietrich Beyer; William L. Guthrie; Stanley R. Makarewicz; Eric Mendel; William John Patrick; Kathleen Alice Perry; William Aaron Pliskin; Jacob Riseman; Paul M. Schaible; Charles L. Standley

Archive | 1986

Procédé pour la fabrication de couches coplanaires métal-isolant multicouches sur un substrat

Melanie Min-Chieh Chow; John Edward Cronin; William Leslie Guthrie; Carter Welling Kaanta; Barbara Jean Luther; William John Patrick; Kathleen Alice Perry; Charles L. Standley

Archive | 1986

A process for producing coplanar much lay-metal insulator films on a substrate.

Melanie Min-Chieh Chow; John Edward Cronin; William Leslie Guthrie; Carter Welling Kaanta; Barbara Jean Luther; William John Patrick; Kathleen Alice Perry; Charles L. Standley

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