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Katsuhiko Oyama

Tokyo Electron

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Publication

Featured researches published by Katsuhiko Oyama.

Archive | 2007

Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus

Satoshi Asari; Kiichi Takahashi; Katsuhiko Oyama

Archive | 2003

Receiving container body for object to be processed

Katsuhiko Oyama

Archive | 2014

Method for managing atmosphere in storage container

Katsuhiko Oyama; Yasushi Takeuchi; Shinji Asari

Archive | 2013

Cover opening/closing apparatus, thermal processing apparatus using the same, and cover opening/closing method

Katsuhiko Oyama; Yasushi Takeuchi

Archive | 2012

SUBSTRATE CONVEYING METHOD, RECORDING MEDIUM IN WHICH PROGRAM IS RECORDED FOR CAUSING SUBSTRATE CONVEYING METHOD TO BE EXECUTED, AND SUBSTRATE CONVEYOR

Daisuke Yamagishi; Katsuhiko Oyama; Masataka Sato; Yasushi Takeuchi

Archive | 2012

SUBSTRATE CONVEYING CONTAINER OPENING/CLOSING DEVICE, LID OPENING/CLOSING DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS

Katsuhiko Oyama; Katsuyuki Hishiya; Yasushi Takeuchi

Archive | 2012

SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE TRANSPORT METHOD, AND RECORDING MEDIUM

Katsuhiko Oyama; Yasushi Takeuchi

Archive | 2015

Substrate heat treatment apparatus, method of installing substrate heat treatment apparatus

Katsuhiko Oyama; Hirofumi Kaneko; Hiroshi Kikuchi; Norio Baba

Archive | 2013

TRANSPORTNG APPARATUS AND PROCESSING APPARATUS

Katsuhiko Oyama; Yasushi Takeuchi

Archive | 2012

Substrate conveying method and substrate conveyor

Daisuke Yamagishi; Katsuhiko Oyama; Masataka Sato; Yasushi Takeuchi

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Collaboration

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Yasushi Takeuchi

Tokyo Electron

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Daisuke Yamagishi

Tokyo Electron

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Masataka Sato

Tokyo Electron

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Hirofumi Kaneko

Tokyo Electron

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Hiroshi Kikuchi

Tokyo Electron

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Katsuyuki Hishiya

Tokyo Electron

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Kiichi Takahashi

Tokyo Electron

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Norio Baba

Tokyo Electron

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Satoshi Asari

Tokyo Electron

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Shinji Asari

Tokyo Electron

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