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Satoshi Asari

Tokyo Electron

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Publication

Featured researches published by Satoshi Asari.

Archive | 2007

Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus

Satoshi Asari; Kiichi Takahashi; Katsuhiko Oyama

Archive | 2005

Vertical Heat Treatment System and Automatic Teaching Method for Transfer Mechanism

Satoshi Asari; Katsuhiko Mihara; Hiroshi Kikuchi

Archive | 2009

VERTICAL THERMAL PROCESSING APPARATUS

Satoshi Asari; Kiichi Takahashi; Toshihiro Abe

Archive | 2005

Vertical heat treating apparatus and automatic teaching method for transfer mechanism

Satoshi Asari; Katsuhiko Mihara; Hiroshi Kikuchi

Archive | 2005

Vertical Heat Treatment System And Method Of Transferring Process Objects

Satoshi Asari; Katsuhiko Mihara; Hiroshi Kikuchi

Archive | 2009

VERTICAL THERMAL PROCESSING APPARATUS AND SUBSTRATE SUPPORTER

Satoshi Asari; Katsuya Toba; Izumi Satoh; Yuichiro Sase

Archive | 2005

Vertical Type of Thermal Processing Apparatus and Method of Using the Same

Satoshi Asari; Katsuhiko Mihara

Archive | 2005

VERTICAL HEAT TREATMENT EQUIPMENT AND METHOD FOR TRANSFERRING OBJECT TO BE TREATED

Satoshi Asari; Katsuhiko Mihara; Hiroshi Kikuchi

Archive | 2009

Operating method of vertical heat treatment device

Satoshi Asari; Katsuhiko Mihara

Archive | 2005

Vertikalwärmebehandlungseinrichtung und verfahren zum übertragen von zu behandelnden objekten Vertical heat treatment apparatus and method for transferring objects to be treated

Satoshi Asari; Katsuhiko Mihara; Hiroshi Kikuchi

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Collaboration

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Katsuhiko Mihara

Tokyo Electron

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Hiroshi Kikuchi

Tokyo Electron

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Kiichi Takahashi

Tokyo Electron

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Izumi Satoh

Tokyo Electron

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Katsuhiko Oyama

Tokyo Electron

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Katsuya Toba

Tokyo Electron

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Toshihiro Abe

Tokyo Electron

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Yuichiro Sase

Tokyo Electron

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