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Katsushi Nakano

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Publication

Featured researches published by Katsushi Nakano.

Archive | 2003

Aligner and method for manufacturing device

Katsushi Nakano; 勝志 中野

Archive | 2005

EXPOSURE DEVICE AND METHOD FOR MANUFACTURING DEVICE

Katsushi Nakano; 勝志 中野

Archive | 2004

Substrate-holding member, aligner, and device manufacturing method

Katsushi Nakano; Nobutaka Umagome; Soichi Yamato; 勝志 中野; 壮一 大和; 伸貴 馬込

Archive | 2001

Electrostatic chucking method of reticle or wafer in charged particle beam aligner

Katsushi Nakano; 勝志 中野

Archive | 2001

Charged-particle-beam microlithography stage including actuators for moving a reticle or substrate relative to the stage, and associated methods

Katsushi Nakano; Shinobu Tokushima; Yukiharu Okubo

Archive | 1999

Manufacture of cooling device, charged particle beam exposure device and semiconductor device

Katsushi Nakano; 勝志 中野

Archive | 1998

Spatial optical modulator and display optical device using same

Katsushi Nakano; 勝志 中野

Archive | 1997

PROBE FOR SCANNING PROBE MICROSCOPE AND METHOD FOR DETECTING FORCE

Katsushi Nakano; 勝志 中野

Archive | 2003

Electron gun and electron beam exposure device

Katsushi Nakano; 勝志 中野

Archive | 2000

Ferrite, charged particle beam exposure device and method for manufacturing semiconductor device

Katsushi Nakano; 勝志 中野

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Collaboration

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Shinobu Tokushima

Nikon

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Yukiharu Okubo

Nikon

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