Yukiharu Okubo

Projection apparatus and method

Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same

Static pressure air bearing

Reticle protection member, reticle carrying device, exposure device and method for carrying reticle

Stage apparatus and inspection apparatus having stage apparatus

Scanning device and scanning method

Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same

Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus

Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus

Method of controlling pressure in a chamber, apparatus for the same, and exposure apparatus