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Yukiharu Okubo

Nikon

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Publication

Featured researches published by Yukiharu Okubo.

Archive | 1996

Projection apparatus and method

Yuji Manabe; Kazuya Okamoto; Yutaka Iwasaki; Yukiharu Okubo

Archive | 2001

Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same

Keiichi Tanaka; Yukiharu Okubo; Hiroaki Narushima; Yukio Kakizaki; Yasushi Yoda

Archive | 2002

Static pressure air bearing

Takuma Tsuda; Shinji Shinohara; Shinobu Tokushima; Yukiharu Okubo; Toshimasa Shimoda; Douglas C. Watson; W. Thomas Novak

Archive | 2012

Reticle protection member, reticle carrying device, exposure device and method for carrying reticle

Motoko Suzuki; Yukiharu Okubo

Archive | 2002

Stage apparatus and inspection apparatus having stage apparatus

Yukiharu Okubo

Archive | 1999

Scanning device and scanning method

Yoshiaki Kohama; Akihiro Goto; Muneki Hamashima; Yukiharu Okubo

Archive | 2003

Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same

Yukiharu Okubo; Hidekazu Kikuchi

Archive | 2003

Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus

Yukiharu Okubo

Archive | 2000

Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus

Shinobu Tokushima; Yukiharu Okubo; Toshimasa Shimoda

Archive | 2000

Method of controlling pressure in a chamber, apparatus for the same, and exposure apparatus

Mutsuo Masada; Masao Nakata; Masahiro Shiraishi; Makoto Ogawa; Katsuhiro Kato; Yukiharu Okubo

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Shinobu Tokushima

Nikon

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Toshimasa Shimoda

Nikon

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Akihiro Goto

Nikon

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Douglas C. Watson

Nikon

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Hiroaki Narushima

Nikon

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Keiichi Tanaka

Nikon

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Muneki Hamashima

Nikon

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Shinji Shinohara

Nikon

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Takuma Tsuda

Nikon

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W. Thomas Novak

Nikon

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