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Katsutoshi Ishii

Tokyo Electron

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Publication

Featured researches published by Katsutoshi Ishii.

Archive | 2003

Heat treatment system and method

Takanobu Tsukui-gun Asano; Katsutoshi Ishii; Hiroyuki Yamamoto; George Hoshi; Kazutoshi Miura

Archive | 2002

System and method for heat treating semiconductor

Katsutoshi Ishii; Yutaka Takahashi; Harunari Hasegawa

Archive | 2001

Method of forming oxynitride film or the like and system for carrying out the same

Katsutoshi Ishii; Kazutoshi Miura

Archive | 2004

Silicon dioxide film forming method

Yutaka Takahashi; Hitoshi Kato; Katsutoshi Ishii; Kazutoshi Miura

Archive | 1998

Ring for use in a semiconductor wafer heat processing apparatus

Katsutoshi Ishii

Archive | 1996

Object-supporting boat

Katsutoshi Ishii; Isao Hagino; Mitsuo Mizukami

Archive | 2008

Vertical plasma processing apparatus for semiconductor process

Hiroyuki Matsuura; Toshiki Takahashi; Jun Sato; Katsuyoshi Aikawa; Katsutoshi Ishii

Archive | 2000

Oxidation treatment method and device

Katsutoshi Ishii; Hisashi Kato; Kazutoshi Miura; Yutaka Takahashi; 一敏 三浦; 寿 加藤; 勝利 石井; 豊 高橋

Archive | 2010

Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type

Masahisa Watanabe; Katsutoshi Ishii; Tetsuya Shibata

Archive | 2006

Process tube for semiconductor device manufacturing apparatus

Katsutoshi Ishii; Hiroyuki Matsuura

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Collaboration

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Yutaka Takahashi

Tokyo Electron

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Kazutoshi Miura

Tokyo Electron

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Harunari Hasegawa

Tokyo Electron

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George Hoshi

Tokyo Electron

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Hiroyuki Matsuura

Tokyo Electron

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Eiichi Toya

Toshiba

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Haruhiko Furuya

Tokyo Electron

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Hiroyuki Yamamoto

Mazda

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Katsushige Harada

Tokyo Electron

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Katsuyoshi Aikawa

Tokyo Electron

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