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Dive into the research topics where Haruhiko Furuya is active.

Publication


Featured researches published by Haruhiko Furuya.


Archive | 2011

Raw material supplying device and film forming apparatus

Yu Wamura; Haruhiko Furuya


Archive | 2003

Capacitor structure and film forming method and apparatus

Yuichiro Morozumi; Kazuhide Hasebe; Shigeru Nakajima; Haruhiko Furuya; Choi Dong-Kyun; Takahito Umehara; Katsushige Harada; Tomonori Fujiwara; Hirotake Fujita


Archive | 2012

GAS SUPPLY APPARATUS, THERMAL TREATMENT APPARATUS, GAS SUPPLY METHOD, AND THERMAL TREATMENT METHOD

Haruhiko Furuya; Hiromi Shima; Yusuke Tachino


Archive | 2005

Thin film deposition apparatus, method for cleaning thin film deposition apparatus, and program

Atsushi Endo; Tomonori Fujiwara; Haruhiko Furuya; Toshishige Harada; Yuuichiro Morozumi; Shigeru Nakajima; Tokin Sai; Kazuo Yabe; 友一朗 両角; 滋 中島; 豪繁 原田; 治彦 古屋; 東均 崔; 和雄 矢部; 友紀 藤原; 篤 遠藤


Archive | 2004

Semiconductor processing method for processing substrate to be processed and its apparatus

Haruhiko Furuya; Yuichiro Morozumi; Hiroaki Ikegawa; Makoto Hirayama; Yuichi Ito


Archive | 2002

Capacitor structure, film forming method and apparatus

Hirotake Fujita; Tomonori Fujiwara; Haruhiko Furuya; Toshishige Harada; Kazuhide Hasebe; Yuuichiro Morozumi; Shigeru Nakajima; Tokin Sai; Takahito Umehara; 両角 友一朗; 中島 滋; 原田 豪繁; 古屋 治彦; 崔 東均; 梅原 隆人; 藤原 友紀; 藤田 博丈; 長谷部 一秀


Archive | 2010

VERTICAL HEAT PROCESSING APPARATUS AND COMPONENT FOR SAME, FOR FORMING HIGH DIELECTRIC CONSTANT FILM

Katsutoshi Ishii; Yoshihiro Ishida; Katsushige Harada; Haruhiko Furuya


Archive | 2008

Formation of metal oxide film

Haruhiko Furuya


Archive | 2013

Substrate processing apparatus and film deposition apparatus

Tadashi Enomoto; Mitsuhiro Tachibana; Haruhiko Furuya; Kentaro Oshimo


Archive | 2003

Film forming method for depositing a plurality of high-k dielectric films

Yuichiro Morozumi; Kazuhide Hasebe; Shigeru Nakajima; Haruhiko Furuya; Dong-Kyun Choi; Takahito Umehara; Katsushige Harada; Tomonori Fujiwara; Hirotake Fujita

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