Katsuyuki Sugita | Researchain

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Archive | 2007

Flow rate range variable flow control device

Ryosuke Doi; Shoichi Hino; Kaoru Hirata; Takashi Hirose; Shinichi Ikeda; Tomokazu Imai; Kazuyuki Miura; Masaaki Nagase; Koji Nishino; Tadahiro Omi; Masahito Saito; Tsutomu Shimazu; Tsutomu Shinohara; Katsuyuki Sugita; Hisashi Tanaka; Shunei Yoshida; 和幸三浦; 智一今井; 俊英吉田; 亮介土肥; 忠弘大見; 強嶋津; 薫平田; 隆広瀬; 雅仁斎藤; 昭一日野; 勝幸杉田; 正明永瀬; 信一池田; 久士田中

Archive | 2015

Flow rate range variable type flow rate control apparatus

Tadahiro Ohmi; Masahito Saito; Shoichi Hino; Tsuyoshi Shimazu; Kazuyuki Miura; Kouji Osaka-shi Nishino; Masaaki Nagase; Katsuyuki Sugita; Kaoru Hirata; Ryousuke Osaka-shi Dohi; Takashi Hirose; Tsutomu Shinohara; Nobukazu Ikeda; Tomokazu Imai; Toshihide Yoshida; Hisashi Tanaka

Archive | 2006

Method of detecting abnormality in fluid supply system, using flow rate control device having pressure sensor

Masaaki Nagase; Ryousuke Dohi; Nobukazu Ikeda; Kouji Nishino; Kaoru Hirata; Katsuyuki Sugita; Atsushi Matsumoto

Archive | 2004

Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device

Tadahiro Ohmi; Kazuhiko Sugiyama; Shoichi Hino; Eiji Takahashi; Makoto Saegusa; Nobukazu Ikeda; Kouji Nishino; Ryousuke Dohi; Toyomi Uenoyama; Katsuyuki Sugita

Archive | 2006

METHOD FOR DETECTING ABNORMALITY IN FLUID SUPPLY LINE USING FLUID CONTROL APPARATUS WITH PRESSURE SENSOR

Masaaki Nagase; Ryousuke Dohi; Nobukazu Ikeda; Kouji Nishino; Kaoru Hirata; Katsuyuki Sugita; Atsushi Matsumoto

Archive | 2009

Automatic pressure regulator for flow rate regulator

Kaoru Hirata; Katsuyuki Sugita; Kouji Nishino; Ryousuke Dohi; Nobukazu Ikeda

Archive | 2008

Gas supply system for semiconductor manufactruing facilities

Kouji Nishino; Ryousuke Dohi; Masaaki Nagase; Kaoru Hirata; Katsuyuki Sugita; Nobukazu Ikeda

Archive | 2009

Gas supply device for semiconductor manufacturing apparatus

Ryosuke Doi; Kaoru Hirata; Shinichi Ikeda; Masaaki Nagase; Koji Nishino; Katsuyuki Sugita; 亮介土肥; 薫平田; 勝幸杉田; 正明永瀬; 信一池田; 功二西野

Archive | 2006

GASKET TYPE ORIFICE AND PRESSURE TYPE FLOW CONTROLLER USING THE SAME

Tadahiro Ohmi; Kouji Nishino; Ryousuke Dohi; Nobukazu Ikeda; Masaaki Nagase; Kaoru Hirata; Katsuyuki Sugita; Tsutomu Shinohara; Takashi Hirose; Tomokazu Imai; Toshihide Yoshida; Hisashi Tanaka

Archive | 2009